公开(公告)号：US20150287590A1

公开(公告)日：2015-10-08

申请号：US14669354

申请日：2015-03-26

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Jung-Min OH ,  Yongsun KO ,  Kwangsu KIM ,  SeokHoon KIM ,  ChangSup MUN ,  Kuntack LEE ,  Hyosan LEE ,  Jihoon JEONG ,  Yong-Jhin CHO

IPC: H01L21/02 ,  H01L21/311 ,  H01L21/3213

CPC classification number: H01L21/02101 ,  H01L21/02057 ,  H01L21/76224 ,  H01L27/10852 ,  H01L27/11582

Abstract: Provided is a method of rinsing and drying a semiconductor device, including forming a pattern on a substrate; rinsing the substrate, where the pattern is formed, using a rinse solution; loading the substrate into a dry chamber; injecting supercritical carbon dioxide into the dry chamber such that rinse solution remaining on the pattern is diluted to have a concentration below 2 percent by weight based on a weight of the rinse solution remaining on the pattern and the supercritical carbon dioxide; and venting the supercritical carbon dioxide such that the dry chamber is maintained at atmospheric pressure to dry the substrate where the pattern is formed.

Abstract translation: 提供了一种冲洗和干燥半导体器件的方法，包括在衬底上形成图案; 使用冲洗溶液冲洗形成图案的基底; 将基板装载到干燥室中; 将超临界二氧化碳注射到干燥室中，使得保留在图案上的冲洗溶液基于残留在图案上的冲洗溶液的重量和超临界二氧化碳被稀释至具有低于2重量％的浓度; 并排出超临界二氧化碳，使得干燥室保持在大气压下，以干燥形成图案的基板。

公开(公告)号：US20170068926A1

公开(公告)日：2017-03-09

申请号：US15260901

申请日：2016-09-09

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Chungyong EOM ,  Jieun KIM ,  Kwangsu KIM ,  Dongbeom LEE ,  Jongshik LEE ,  Hyunsuk MIN ,  Soobyoung OH ,  Jaeeun KANG ,  Changhan KIM ,  Jongyoub RYU

IPC: G06Q10/06

CPC classification number: G06Q10/063116 ,  G06Q10/063114 ,  G06Q10/063118

Abstract: A method and apparatus for managing a guest room are provided. The method in which a server manages a room in a room management system including at least one terminal and a gateway includes: determining a room status; assigning a housekeeper to the room based on the room status; transmitting room information to a housekeeper terminal; and receiving and updating a housekeeping status from the housekeeper terminal.

Abstract translation: 提供了一种用于管理客房的方法和装置。 服务器管理包括至少一个终端和网关的房间管理系统中的房间的方法包括：确定房间状态; 根据房间状况将管家分配给房间; 将房间信息发送给管家终端; 以及从管家终端接收和更新管理状态。