SEMICONDUCTOR MEMORY DEVICE
    1.
    发明公开

    公开(公告)号:US20240064968A1

    公开(公告)日:2024-02-22

    申请号:US18321511

    申请日:2023-05-22

    CPC classification number: H10B12/482 H10B12/315 H10B12/34 H10B12/485 H10B12/02

    Abstract: Provided is a semiconductor memory device comprising an active region extending in a cell isolation layer, wherein the active region includes a first region and a second region; a bit line intersects the active region; a bit line contact between a substrate and the bit line, wherein the bit line contact is electrically connected to the first region; a bit line spacer that is on side surfaces of the bit line and the bit line contact; a node pad on a lateral side of the bit line spacer, wherein the node pad is electrically connected to the second region; a storage contact that is on the node pad and on a side surface of the bit line spacer, wherein the storage contact includes a first part having a first width and a second part having a second width different from the first width.

Patent Agency Ranking