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公开(公告)号:US20240064968A1
公开(公告)日:2024-02-22
申请号:US18321511
申请日:2023-05-22
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Woo Young CHOI , Hui-Jung KIM , Ji Hoon SUNG , Ga Eun CHOI , Sang Kyu SUN
IPC: H10B12/00
CPC classification number: H10B12/482 , H10B12/315 , H10B12/34 , H10B12/485 , H10B12/02
Abstract: Provided is a semiconductor memory device comprising an active region extending in a cell isolation layer, wherein the active region includes a first region and a second region; a bit line intersects the active region; a bit line contact between a substrate and the bit line, wherein the bit line contact is electrically connected to the first region; a bit line spacer that is on side surfaces of the bit line and the bit line contact; a node pad on a lateral side of the bit line spacer, wherein the node pad is electrically connected to the second region; a storage contact that is on the node pad and on a side surface of the bit line spacer, wherein the storage contact includes a first part having a first width and a second part having a second width different from the first width.