专利检索 ap:("SAMSUNG ELECTRONICS CO., LTD.") AND inv:"Seojoo Choi" 第 1 页

1.

发明公开
WAFER TRANSFER APPARATUS CAPABLE OF AUTOMATIC TEACHING AND SEMICONDUCTOR PROCESSING SYSTEM INCLUDING THE SAME 审中-公开

公开(公告)号：US20240021452A1

公开(公告)日：2024-01-18

申请号：US18117259

申请日：2023-03-03

申请人： SAMSUNG ELECTRONICS CO., LTD.

发明人： Beomsoo Hwang , Kongwoo Lee , Myungki Song , Kyusang Lee , Seojoo Choi , Jinhyuk Choi

IPC分类号： H01L21/67 , H01L21/687 , B65G47/90

CPC分类号： H01L21/67259 , H01L21/67201 , H01L21/68707 , B65G47/905 , B65G47/907

摘要： A wafer transfer apparatus includes a controller, a wafer transfer robot including a hand unit configured to hold a wafer, a driving unit connected to the hand unit and configured to move the wafer, and a sensor unit provided on the driving unit, and a plurality of transfer structures configured to exchange the wafer with the wafer transfer robot, each of the plurality of transfer structures including a plurality of markers recognizable by the sensor unit, where the sensor unit includes a camera sensor recognizing the plurality of markers and a laser sensor configured to measure distances to the plurality of markers by emitting a laser to the plurality of markers and receiving the laser reflected from the plurality of markers.