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公开(公告)号:US20180028936A1
公开(公告)日:2018-02-01
申请号:US15482549
申请日:2017-04-07
发明人: JUNG-MIN OH , JI-HOON JEONG , DONG-GYUN HAN , KUN-TACK LEE , HYO-SAN LEE , YONG-MYUNG JUN
CPC分类号: B01D11/0407 , B01D11/0203 , B01D11/0403 , B01D11/0411 , G01N21/3554 , H01L21/02101 , H01L21/67017 , H01L21/67028 , H01L21/67034 , H01L21/67109 , H01L21/6719
摘要: A source supplier includes a source reservoir that contains a liquefied source fluid for a supercritical process, a vaporizer that vaporizes the liquefied source fluid into a gaseous source fluid under high pressure, a purifier that removes organic impurities and moistures from the gaseous source fluid and an analyzer connected to the purifier that analyzes an impurity fraction and a moisture fraction in the gaseous source fluid. Moisture and organic impurities are removed from the source fluid to reduce the moisture concentration of the supercritical fluid in the supercritical process.