公开(公告)号：US20230096935A1

公开(公告)日：2023-03-30

申请号：US18074615

申请日：2022-12-05

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： YONGIN LEE ,  HYUK LEE ,  SEUNGHYUN CHOI

IPC: G06F1/3206 ,  G06F1/28

Abstract: A storage device includes a solid state drive (SSD), a field programmable gate array (FPGA), a power sensor and a global controller. The SSD stores data and receives power through a power rail connected to a host device. The FPGA processes data read from the SSD or data to be stored in the SSD and receives power through the power rail. The power sensor is connected to the power rail and generates a measured power value corresponding to a total power consumed by the SSD and the FPGA by measuring the total power. The global controller determines one of the SSD and the FPGA as a priority component operating with a fixed performance and determines the other of the SSD and the FPGA as a non-priority component operating with a variable performance in a priority mode based on power control information provided from the host device.

公开(公告)号：US20220129056A1

公开(公告)日：2022-04-28

申请号：US17239654

申请日：2021-04-25

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： YONGIN LEE ,  HYUK LEE ,  SEUNGHYUN CHOI

IPC: G06F1/3206 ,  G06F1/28

Abstract: A storage device includes a solid state drive (SSD), a field programmable gate array (FPGA), a power sensor and a global controller. The SSD stores data and receives power through a power rail connected to a host device. The FPGA processes data read from the SSD or data to be stored in the SSD and receives power through the power rail. The power sensor is connected to the power rail and generates a measured power value corresponding to a total power consumed by the SSD and the FPGA by measuring the total power. The global controller determines one of the SSD and the FPGA as a priority component operating with a fixed performance and determines the other of the SSD and the FPGA as a non-priority component operating with a variable performance in a priority mode based on power control information provided from the host device.

公开(公告)号：US20240038536A1

公开(公告)日：2024-02-01

申请号：US18319850

申请日：2023-05-18

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： YONGIN LEE ,  DONGGAP SHIN ,  WOOYOUNG KIM ,  BUMKI MOON ,  JIWON MOON ,  INHWA BAEK ,  SEUNGDAE SEOK ,  SIWOONG WOO ,  SEHOON JANG

IPC: H01L21/18 ,  H01L21/02 ,  H01L21/67

CPC classification number: H01L21/187 ,  H01L21/02076 ,  H01L21/67167

Abstract: A plasma processing apparatus includes a load lock chamber switchable between an atmospheric pressure state and a vacuum pressure state, and a substrate processing apparatus configured to transfer a substrate to and from the load lock chamber and to perform a plasma process on a surface of the substrate in a plasma chamber under a vacuum atmosphere. The substrate processing apparatus includes a substrate stage disposed within the plasma chamber and configured to support the substrate, a plasma gas supply configured to supply a plasma gas into the plasma chamber, a steam supply configured to supply a water vapor into the plasma chamber, and a plasma generator configured to generate a plasma in the plasma chamber.