Displacement detecting apparatus, displacement detecting method and substrate processing apparatus

    公开(公告)号:US10402997B2

    公开(公告)日:2019-09-03

    申请号:US15333812

    申请日:2016-10-25

    IPC分类号: G06K9/62 G06T7/73

    摘要: This invention is to provide a technique capable of detecting a displacement of a positioning object with respect to a reference position in an actual space with high accuracy. A position of an imaging object detected in an imaged image is converted into a displacement of the positioning object with respect to the reference position in the actual space based on conversion information representing a correlative relationship between the position of the imaging object in the image and the displacement of the positioning object from the reference position. The conversion information is determined in advance based on positions of the imaging object detected from a plurality of images respectively imaged with the positioning object positioned at each of a plurality of imaging positions.

    Method for building image determination model, image determination model, and image determination method

    公开(公告)号:US11373293B2

    公开(公告)日:2022-06-28

    申请号:US16904697

    申请日:2020-06-18

    IPC分类号: G06T7/00 G06N20/00

    摘要: A method for building an image determination model that determines whether a print image is a good image or a failure image includes a step of determining whether the print image is a high-density image or a low-density image; a step of generating teaching data by combining pseudo-failure data with to-be-combined image data, based on a result of the determination; and a step of performing machine learning. Regarding the combining of the pseudo-failure data, for a print image determined to be the high-density image, low-density pseudo-failure data is combined with to-be-combined image data, and for a print image determined to be the low-density image, high-density pseudo-failure data is combined with to-be-combined image data.

    Displacement detecting apparatus, displacement detecting method and substrate processing apparatus

    公开(公告)号:US10580163B2

    公开(公告)日:2020-03-03

    申请号:US15663116

    申请日:2017-07-28

    摘要: A displacement detecting apparatus according to the invention comprises: a mover which moves and positions a positioning object; an imager which images an image including an imaging object which is the positioning object or an object displacing integrally with the positioning object as the positioning object is displaced; and a displacement detector which detects the imaging object from the image imaged by the imager and detects a displacement of the positioning object based on the position of the imaging object detected in the image, wherein the displacement detector obtains a displacement amount of the positioning object with respect to a predetermined reference position from a value obtained by multiplying a distance between the position of the imaging object and the reference position in the image by a coefficient determined according to size of the imaging object in the image.