公开(公告)号：US20230176086A1

公开(公告)日：2023-06-08

申请号：US18162874

申请日：2023-02-01

Applicant: SEIKO EPSON CORPORATION

Inventor： Fumiya ITO

IPC: G01P15/135 ,  G01P15/08 ,  G01P15/125 ,  B81B7/00

CPC classification number: G01P15/135 ,  G01P15/0802 ,  G01P15/125 ,  B81B7/0016 ,  G01P2015/0871 ,  B81B2201/0235 ,  G01P2015/0831

Abstract: A MEMS device includes: a substrate as a base including a support portion and a detection electrode as a fixed electrode; a movable body supported to the support portion with a major surface of the movable body facing the fixed electrode; and an abutment portion facing at least a portion of an outer edge of the movable body and restricting rotational displacement in an in-plane direction of the major surface. The abutment portion includes an abutment surface including an abutment position at which the movable body abuts against the abutment portion due to the rotational displacement of the movable body, and a hollow portion provided opposing the abutment surface.

公开(公告)号：US20240310409A1

公开(公告)日：2024-09-19

申请号：US18604913

申请日：2024-03-14

Applicant: SEIKO EPSON CORPORATION

Inventor： Fumiya ITO

IPC: G01P21/00

CPC classification number: G01P21/00

Abstract: A method for diagnosing a failure in a sensor module includes: a first diagnosis step of diagnosing that when a comparison result between a first angular velocity based on an output signal of a first sensor element detecting an angular velocity around a first axis and a second angular velocity based on an output signal of a second sensor element detecting an angular velocity around the first axis satisfies a first standard, the first sensor element and the second sensor element are normal; and a second diagnosis step of performing failure diagnosis of the first sensor element using the first angular velocity signal or the second angular velocity signal and an acceleration signal based on an output signal of a third sensor element detecting an acceleration in a second-axis direction when the comparison result does not satisfy the first standard.

公开(公告)号：US20240402362A1

公开(公告)日：2024-12-05

申请号：US18678430

申请日：2024-05-30

Applicant: SEIKO EPSON CORPORATION

Inventor： Fumiya ITO ,  Ryota NAGASHIMA

IPC: G01S19/49 ,  G01C21/16

Abstract: An azimuth calculation device includes: a first azimuth calculation unit that calculates a first azimuth based on a satellite signal or a detection result of an external sensor; a second azimuth calculation unit that calculates a second azimuth based on an angular velocity signal; a third azimuth calculation unit that calculates a third azimuth based on the first azimuth and the second azimuth; a storage unit that stores temperature characteristic information of an angular velocity bias; a temperature characteristic estimation unit that estimates a temperature characteristic of the angular velocity bias based on the second azimuth and the third azimuth and updates the temperature characteristic information; and an angular velocity bias prediction unit that predicts the angular velocity bias based on the temperature and the temperature characteristic information. The second azimuth calculation unit calculates the second azimuth based on the angular velocity bias predicted.

公开(公告)号：US20210063433A1

公开(公告)日：2021-03-04

申请号：US17004108

申请日：2020-08-27

Applicant: Seiko Epson Corporation

Inventor： Fumiya ITO

IPC: G01P15/125 ,  G01P1/02

Abstract: An inertial sensor includes: a sensor unit; a base substrate having the sensor unit arranged at one surface thereof and having a first lateral surface and a second lateral surface; a package accommodating the sensor unit and the base substrate and having an inner bottom surface, a first inner wall surface, and a second inner wall surface; a first adhesive bonding together an other surface of the base substrate and an inner bottom surface of the package; a second adhesive bonding together the first inner wall surface of the package and the first lateral surface; and a third adhesive bonding together the second inner wall surface of the package and the second lateral surface.

公开(公告)号：US20250012829A1

公开(公告)日：2025-01-09

申请号：US18885905

申请日：2024-09-16

Applicant: SEIKO EPSON CORPORATION

Inventor： Fumiya ITO

IPC: G01P15/135 ,  B81B7/00 ,  G01P15/08 ,  G01P15/125

Abstract: A MEMS device includes: a substrate as a base including a support portion and a detection electrode as a fixed electrode; a movable body supported to the support portion with a major surface of the movable body facing the fixed electrode; and an abutment portion facing at least a portion of an outer edge of the movable body and restricting rotational displacement in an in-plane direction of the major surface. The abutment portion includes an abutment surface including an abutment position at which the movable body abuts against the abutment portion due to the rotational displacement of the movable body, and a hollow portion provided opposing the abutment surface.

公开(公告)号：US20240094239A1

公开(公告)日：2024-03-21

申请号：US18524231

申请日：2023-11-30

Applicant: SEIKO EPSON CORPORATION

Inventor： Fumiya ITO

IPC: G01P15/135 ,  B81B7/00 ,  G01P15/08 ,  G01P15/125

CPC classification number: G01P15/135 ,  B81B7/0016 ,  G01P15/0802 ,  G01P15/125 ,  B81B2201/0235 ,  G01P2015/0831 ,  G01P2015/0871

Abstract: A MEMS device includes: a substrate as a base including a support portion and a detection electrode as a fixed electrode; a movable body supported to the support portion with a major surface of the movable body facing the fixed electrode; and an abutment portion facing at least a portion of an outer edge of the movable body and restricting rotational displacement in an in-plane direction of the major surface. The abutment portion includes an abutment surface including an abutment position at which the movable body abuts against the abutment portion due to the rotational displacement of the movable body, and a hollow portion provided opposing the abutment surface.

公开(公告)号：US20210255214A1

公开(公告)日：2021-08-19

申请号：US17236244

申请日：2021-04-21

Applicant: Seiko Epson Corporation

Inventor： Fumiya ITO

IPC: G01P15/135 ,  G01P15/08 ,  G01P15/125 ,  B81B7/00

Abstract: A MEMS device includes: a substrate as a base including a support portion and a detection electrode as a fixed electrode; a movable body supported to the support portion with a major surface of the movable body facing the fixed electrode; and an abutment portion facing at least a portion of an outer edge of the movable body and restricting rotational displacement in an in-plane direction of the major surface. The abutment portion includes an abutment surface including an abutment position at which the movable body abuts against the abutment portion due to the rotational displacement of the movable body, and a hollow portion provided opposing the abutment surface.

公开(公告)号：US20190107397A1

公开(公告)日：2019-04-11

申请号：US16155944

申请日：2018-10-10

Applicant: Seiko Epson Corporation

Inventor： Fumiya ITO

IPC: G01C21/16 ,  G01C19/5712 ,  G01C21/20 ,  G05D1/08 ,  G01S19/03

Abstract: A MEMS device includes: a base (substrate) having a support part and a fixed electrode (detection electrode); a movable member supported on the support part with a main surface facing the fixed electrode; and a lid joined to the base and forming an accommodation space in which the movable member is accommodated. The lid has an abutting part which faces, via a space, at least a part of an outer edge of the movable member accommodated in the accommodation space and regulates displacement in an in-plane direction of the main surface.

公开(公告)号：US20190094262A1

公开(公告)日：2019-03-28

申请号：US16111314

申请日：2018-08-24

Applicant: Seiko Epson Corporation

Inventor： Fumiya ITO

IPC: G01P15/135 ,  G01P15/125 ,  G01P15/08

Abstract: A MEMS device includes: a substrate as a base including a support portion and a detection electrode as a fixed electrode; a movable body supported to the support portion with a major surface of the movable body facing the fixed electrode; and an abutment portion facing at least a portion of an outer edge of the movable body and restricting rotational displacement in an in-plane direction of the major surface. The abutment portion includes an abutment surface including an abutment position at which the movable body abuts against the abutment portion due to the rotational displacement of the movable body, and a hollow portion provided opposing the abutment surface.