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公开(公告)号：US20180065365A1
公开(公告)日：2018-03-08
申请号：US15807162
申请日：2017-11-08
IPC分类号： B41J2/14 , H01L41/09 , B41J2/045 , H01L41/047 , H01L41/053 , B41J2/16
CPC分类号： B41J2/14201 , B41J2/04521 , B41J2/14072 , B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1626 , B41J2/1631 , B41J2/1643 , B41J2/1646 , B41J2002/14419 , B41J2002/14491 , B41J2202/18 , H01L41/0475 , H01L41/053 , H01L41/09 , H01L41/0973
摘要： A piezoelectric device includes an actuator substrate that includes a plurality of piezoelectric element rows having a plurality of piezoelectric elements, and a wiring substrate that is disposed so as to face the actuator substrate. The piezoelectric element rows include a common electrodes common to the plurality of the piezoelectric elements. The actuator substrate includes a plurality of first common wirings connected to each of the common electrodes of the plurality of the piezoelectric element rows. The wiring substrate includes a plurality of second common wirings connected to each of the first common wirings of the plurality of piezoelectric element rows, and a plurality of auxiliary wirings buried in a groove portion formed in the wiring substrate. The auxiliary wirings are connected to each of the second common wirings, and the plurality of auxiliary wirings are not connected to each other.
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公开(公告)号：US20170266971A1
公开(公告)日：2017-09-21
申请号：US15450877
申请日：2017-03-06
IPC分类号： B41J2/14
CPC分类号： B41J2/14233 , B41J2/04521 , B41J2/14072 , B41J2002/14362 , B41J2002/14491 , B41J2202/13 , B41J2202/18 , B41J2202/20
摘要： A piezoelectric device includes an actuator substrate that includes two rows of piezoelectric element rows piezoelectric elements, and a wiring substrate that is disposed so as to face the actuator substrate. The piezoelectric element rows include individual electrodes disposed for each of the piezoelectric elements, and a common electrode common to the piezoelectric elements. The wiring substrate includes a core portion disposed on a surface on the actuator substrate side, an individual wiring portion disposed for each of the piezoelectric element rows that partially covers the core portion, and a common wiring portion disposed for each of the piezoelectric element rows that partially covers the core portion. The two rows of piezoelectric element rows are respectively disposed so as to interpose the core portion. The individual wiring portion and the common wiring portion are respectively electrically connected to the individual electrode and the common electrode.
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公开(公告)号：US20170313074A1
公开(公告)日：2017-11-02
申请号：US15493011
申请日：2017-04-20
发明人： Munehide SAIMEN , Eiju HIRAI , Masao NAKAYAMA
IPC分类号： B41J2/14
CPC分类号： B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1626 , B41J2/1631 , B41J2/1642 , B41J2/1646 , B41J2002/14491
摘要： A MEMS device includes a first substrate in which a first electrode layer, a dielectric layer, and a second electrode layer are stacked on a driving region in this order; and a second substrate which is disposed to face a surface on which the dielectric layer of the first substrate is stacked. The first electrode layer and the dielectric layer extend beyond the second electrode layer toward a non-driving region separated from the driving region, a first resin having elasticity is disposed in a region including an end of the second electrode layer in an extending direction of the dielectric layer, and the first substrate and the second substrate are fixed with an adhesive in a state where the elastically deformed first resin is sandwiched therebetween.
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公开(公告)号：US20170217175A1
公开(公告)日：2017-08-03
申请号：US15418987
申请日：2017-01-30
CPC分类号： B41J2/14201 , B41J2/04548 , B41J2/04581 , B41J2/14072 , B41J2/14233 , B41J2/17596 , B41J2/19 , B41J2002/14241 , B41J2002/14491 , B41J2202/07 , B41J2202/18
摘要： A MEMS device includes a plurality of movable regions, wiring lines extending along a first direction from the movable regions, and electrodes connected to the wiring lines. The electrodes include connection regions for connecting other electrode terminals to the connection regions. A plurality of the connection regions are disposed along a second direction intersecting the first direction. A distance between centers of connection regions that are adjacent in the second direction is longer than a distance between centers of movable regions that are adjacent in the second direction.
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5.发明申请公开(公告)号：US20170368826A1
公开(公告)日：2017-12-28
申请号：US15627662
申请日：2017-06-20
发明人： Motoki TAKABE , Eiju HIRAI , Munehide SAIMEN , Yasuyuki MATSUMOTO , Shuichi TANAKA , Tsuyoshi YODA
CPC分类号： B41J2/14201 , B41J2/1404 , B41J2/14072 , B41J2/14088 , B41J2/14233 , B41J2/1607 , B41J2002/14491 , B41J2202/18
摘要： A MEMS device includes a wire that is formed of a conductive portion embedded into a recess opened in a first face of a substrate and a bump electrode that is electrically connected to the wire. A total width, in a second direction intersecting a first direction along which the wire extends on the first face, of an opening of the recess in a connection region where the wire and the bump electrode are electrically connected to each other is narrower than a width, in the second direction, of an opening of the recess in a region outside the connection region.
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公开(公告)号：US20170225464A1
公开(公告)日：2017-08-10
申请号：US15422261
申请日：2017-02-01
IPC分类号： B41J2/14 , H01L41/047 , H01L41/053 , H01L41/09
CPC分类号： B41J2/14201 , B41J2/04521 , B41J2/14072 , B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1626 , B41J2/1631 , B41J2/1643 , B41J2/1646 , B41J2002/14419 , B41J2002/14491 , B41J2202/18 , H01L41/0475 , H01L41/053 , H01L41/09 , H01L41/0973
摘要： A piezoelectric device includes an actuator substrate that includes a plurality of piezoelectric element rows having a plurality of piezoelectric elements, and a wiring substrate that is disposed so as to face the actuator substrate. The piezoelectric element rows include a common electrodes common to the plurality of the piezoelectric elements. The actuator substrate includes a plurality of first common wirings connected to each of the common electrodes of the plurality of the piezoelectric element rows. The wiring substrate includes a plurality of second common wirings connected to each of the first common wirings of the plurality of piezoelectric element rows, and a plurality of auxiliary wirings buried in a groove portion formed in the wiring substrate. The auxiliary wirings are connected to each of the second common wirings, and the plurality of auxiliary wirings are not connected to each other.
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公开(公告)号：US20170266972A1
公开(公告)日：2017-09-21
申请号：US15452560
申请日：2017-03-07
IPC分类号： B41J2/14
CPC分类号： B41J2/14233 , B41J2002/14362 , B41J2002/14491 , B41J2202/13 , B41J2202/20
摘要： A piezoelectric device includes an actuator substrate that includes a plurality of piezoelectric element rows having a plurality of piezoelectric elements, and a wiring substrate that is disposed so as to face the actuator substrate. The piezoelectric element rows include a plurality of individual electrodes disposed for each of the piezoelectric elements, and a common electrodes common to the plurality of piezoelectric elements. The wiring substrate includes a core portion disposed on a surface on the actuator substrate side, an individual wiring portion that partially covers the core portion, a common wiring portion that partially covers the core portion, and an auxiliary wiring disposed in a groove portion disposed on a first principal surface on the side opposite to the actuator substrate or on a second principal surface on the actuator substrate side. The auxiliary wiring is electrically connected to the common wiring portion. The individual electrode and the common electrode are respectively electrically connected to the individual wiring portion and the common wiring portion.
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公开(公告)号：US20170144442A1
公开(公告)日：2017-05-25
申请号：US15354851
申请日：2016-11-17
CPC分类号： B41J2/14201 , B41J2/14233 , B41J2002/14241 , B41J2002/14266 , B41J2002/14491 , B41J2202/11 , B41J2202/18 , B81B7/0061 , B81B2201/052
摘要： A MEMS device includes a drive region having a stacked structural body in which a first electrode layer, a first dielectric layer, and a second electrode layer are stacked in that order. The stacked structural body extends from the drive region to a non-drive region that is outer than the drive region and, in an extending direction of the stacked structural body, the first electrode layer and the first dielectric layer extend farther outward than the second electrode layer. A second dielectric layer covering an end of the second electrode layer in the extending direction is stacked on the second electrode layer in the non-drive region and the first dielectric layer that is formed outer in the extending direction than the second electrode layer. A third electrode layer electrically connected to the second electrode layer is stacked on the second dielectric layer and on the second electrode layer in a region outside the second dielectric layer. In the extending direction, the end of the second electrode layer is formed more to a drive region side than a second dielectric layer-side end of the third electrode layer.
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