公开(公告)号：US12082313B2

公开(公告)日：2024-09-03

申请号：US17531798

申请日：2021-11-21

Applicant: SEMES CO., LTD.

Inventor： Soon Hyun Kim ,  Byung Geun Kim ,  Byoung Chan Lee

IPC: H01L21/67 ,  F28D21/00 ,  H01L21/683 ,  H05B1/02 ,  H05B3/06

CPC classification number: H05B1/0233 ,  F28D21/0015 ,  H01L21/67144 ,  H05B3/06 ,  H01L21/6838

Abstract: A heater assembly includes a housing having an accommodation space therein and having a cooling gas inlet communicating with the accommodation space, a heater coupled to the housing, and a porous block disposed in the accommodation space.