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公开(公告)号：US20220174786A1
公开(公告)日：2022-06-02
申请号：US17531798
申请日：2021-11-21
Applicant: SEMES CO., LTD.
Inventor： Soon Hyun KIM , Byung Geun KIM , Byoung Chan LEE
Abstract: A heater assembly includes a housing having an accommodation space therein and having a cooling gas inlet communicating with the accommodation space, a heater coupled to the housing, and a porous block disposed in the accommodation space.
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