公开(公告)号：US20210013029A1

公开(公告)日：2021-01-14

申请号：US16920418

申请日：2020-07-02

Applicant: SEMES CO., LTD.

Inventor： Do Yeon KIM ,  Se Hoon OH ,  Won Geun KIM ,  Ju Mi LEE ,  Ho Jong HWANG ,  Pil Kyun HEO ,  Hyun YOON ,  Choong Hyun LEE ,  Hyun Goo PARK

IPC: H01L21/02 ,  H01L21/67

Abstract: Provided is a substrate treatment apparatus including a treatment container equipped with a conductive member. The conductive member is made of a material having a lower resistivity than that of the treatment container. The conductive member prevents a rise of an electric potential of the treatment container, which is caused by charging during treatment of a substrate, thereby preventing the substrate from being contaminated and damaged by particles and electrostatic arcing.