公开(公告)号：US12224189B2

公开(公告)日：2025-02-11

申请号：US17564562

申请日：2021-12-29

Applicant: SEMES CO., LTD.

Inventor： Young Seop Choi ,  Yong-Jun Seo ,  Sang Hyun Son ,  Jun Gwon Lee ,  Hak Hyon Kim ,  Sun Yong Park

IPC: H01L21/67 ,  C23C16/02 ,  C23C16/455 ,  C23C16/52 ,  G01L5/00 ,  G01L19/08 ,  G01L19/14

Abstract: A substrate type sensor includes a substrate shape member, a pressure sensor panel provided at the substrate shape member, the pressure sensor panel including a plurality of pressure sensors, a central module including a transmission unit, the reception unit receiving data from the pressure sensor panel, and a battery proving power to the pressure sensor panel and the central module.