公开(公告)号：US11148150B2

公开(公告)日：2021-10-19

申请号：US16659355

申请日：2019-10-21

Applicant: SEMES CO., LTD.

Inventor： Byoungdoo Choi ,  Yangyeol Ryu ,  Dong Sub Oh ,  Hye Bin Baek

IPC: B05B1/04 ,  B05B1/34 ,  B05C5/02 ,  B05C5/00

Abstract: The inventive concept relates to a liquid dispensing nozzle and an apparatus for treating a substrate. The liquid dispensing nozzle includes a first fluid channel that is formed in the nozzle and through which a processing liquid flows and a second fluid channel in communication with the first fluid channel, the second fluid channel being connected to a dispensing end of the nozzle. The second fluid channel has a larger width than the first fluid channel, and a central axis of the first fluid channel and a central axis of the second fluid channel are connected with each other in a straight line.