公开(公告)号：US20250132145A1

公开(公告)日：2025-04-24

申请号：US18901094

申请日：2024-09-30

Applicant: SEMES CO., LTD.

Inventor： Do Hyeon YOON ,  Mi So PARK ,  Yong Joon IM ,  Hye Bin GWON

IPC: H01L21/02 ,  B08B3/04 ,  B08B3/08 ,  B08B7/00 ,  B08B15/02

Abstract: Disclosed is a manufacturing method including: a substrate loading operation of loading a substrate into a liquid treating chamber; a liquid treating operation of supplying a treatment solution to the substrate rotating in the liquid treating chamber through a nozzle; a substrate unloading operation of unloading the substrate from the liquid treating chamber, and a pressure control operation of changing a pressure of a space above the substrate at least one time in a period between the substrate loading operation and the substrate unloading operation.