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公开(公告)号：US20220065920A1
公开(公告)日：2022-03-03
申请号：US17406751
申请日：2021-08-19
Applicant: SEMES CO., LTD.
Inventor： Hyon Jin LEE , Jun Seok LEE
IPC: G01R31/26 , H01L21/677
Abstract: A chamber module and a test handler including the same are disclosed. The chamber module includes a soak chamber providing a temperature adjusting space for adjusting a temperature of semiconductor devices, an elevating member disposed in the soak chamber and for elevating a tray in which the semiconductor devices are accommodated, a guide member extending in a vertical direction in the soak chamber and for guiding movement of the elevating member, and a temperature adjusting part for adjusting a temperature of the guide member.
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