公开(公告)号：US20230076790A1

公开(公告)日：2023-03-09

申请号：US17896782

申请日：2022-08-26

申请人： SEMES CO., LTD.

发明人： Kyung Min KIM ,  In Hwang PARK ,  Joo Jib PARK ,  Hyun Jin YANG ,  Ji Hyeong LEE

IPC分类号： B08B15/04 ,  B08B3/02 ,  B08B13/00 ,  B08B3/08

摘要： According to an embodiment of the present invention, there are provided an exhaust assembly capable of uniformly forming an air flow in an exhaust step of discharging a gas to the outside, and a liquid processing apparatus and substrate processing equipment including the exhaust assembly. According to the present invention, the exhaust assembly that discharges a gas generated in a substrate processing process includes at least two or more intake ports into which the gas flows, a body portion that communicates with the intake ports and provides symmetrical paths for discharging the gas, a guide portion that is installed to guide a flow of the gas at the body portion, and an exhaust port from which the gas is discharged. The guide portion includes a flow guide that is installed to be adjacent to at least one of the intake ports and guides a direction of the gas to equally divide the flow of the gas, and a flow-rate guide that is installed around the intake port most adjacent to the exhaust port among the intake ports and is formed to reduce a cross-sectional area of a flow path of the gas.

公开(公告)号：US20210125841A1

公开(公告)日：2021-04-29

申请号：US17080581

申请日：2020-10-26

申请人： SEMES CO., LTD.

发明人： In Hwang PARK ,  Sung Pil KIM ,  Kuk Saeng KIM ,  Kyung Min KIM

IPC分类号： H01L21/67 ,  H01L21/687

摘要： A substrate processing apparatus includes a rotation unit supporting and rotating a substrate, a chemical ejection unit ejecting a chemical fluid toward the rotation unit, a chemical recovery unit disposed close to the rotation unit and collecting a chemical fluid scattered from the rotation unit, a first lifting unit coupled to the chemical recovery unit and moving upward and downward the chemical recovery unit relative to the rotation unit, and a first position correction member allowing the chemical recovery unit to be elastically supported by the first lifting unit and changing a relative position of the chemical recovery unit with respect to the lifting unit.