公开(公告)号：US20220157645A1

公开(公告)日：2022-05-19

申请号：US17531626

申请日：2021-11-19

Applicant: SEMES CO., LTD.

Inventor： SOO HAN SONG ,  CHUL GOO KIM ,  JUNG BONG CHOI ,  CHEOL-YONG SHIN ,  JAE-YOUL KIM

IPC: H01L21/687 ,  H01L21/67

Abstract: Provided is a support unit for supporting a substrate, the support unit including: a heating member configured to transmit thermal energy to a supported substrate; a reflective plate disposed under the heating member and configured to reflect thermal energy generated by the heating member to the substrate; a cooling plate disposed under the reflective plate and formed with a cooling flow path in which a cooling fluid flows; and a gas supply line configured to supply gas to a space between the reflective plate and the cooling plate.