公开(公告)号：US20220157645A1

公开(公告)日：2022-05-19

申请号：US17531626

申请日：2021-11-19

Applicant: SEMES CO., LTD.

Inventor： SOO HAN SONG ,  CHUL GOO KIM ,  JUNG BONG CHOI ,  CHEOL-YONG SHIN ,  JAE-YOUL KIM

IPC: H01L21/687 ,  H01L21/67

Abstract: Provided is a support unit for supporting a substrate, the support unit including: a heating member configured to transmit thermal energy to a supported substrate; a reflective plate disposed under the heating member and configured to reflect thermal energy generated by the heating member to the substrate; a cooling plate disposed under the reflective plate and formed with a cooling flow path in which a cooling fluid flows; and a gas supply line configured to supply gas to a space between the reflective plate and the cooling plate.

公开(公告)号：US20190189471A1

公开(公告)日：2019-06-20

申请号：US16224891

申请日：2018-12-19

Applicant: SEMES CO., LTD.

Inventor： BUYOUNG JUNG ,  JONGHAN KIM ,  YOUNG JIN JANG ,  JIN TACK YU ,  YOUNGJUN CHOI ,  DAEHUN KIM ,  BYUNGSUN BANG ,  JONGHYEON WOO ,  HEEHWAN KIM ,  CHEOL-YONG SHIN ,  GUI SU PARK

IPC: H01L21/67 ,  H01L21/683

Abstract: Disclosed are a standby port and a substrate processing apparatus having the same. The standby port exhausts fumes generated when a processing liquid is discharged into the standby port before the supply of the processing liquid onto a substrate, thereby preventing pollution of a chamber atmosphere.