公开(公告)号：US20230194585A1

公开(公告)日：2023-06-22

申请号：US17992972

申请日：2022-11-23

Applicant: SEMES CO., LTD.

Inventor： Tae Hoon JO ,  Hyo Seong SEONG ,  Ji Hyun KIM ,  Ja Myung GU

IPC: G01R27/16

CPC classification number: G01R27/16

Abstract: Proposed are a method and an apparatus for determining a cable length for plasma processing equipment. More particularly, proposed is a method of determining a length of a power supply cable for plasma processing equipment that performs plasma processing through power supply at radio frequencies (RF) of several tens of MHz or more.