公开(公告)号：US20230215746A1

公开(公告)日：2023-07-06

申请号：US18069634

申请日：2022-12-21

Applicant: SEMES CO., LTD.

Inventor： Dong Ok AHN ,  Myeong Geun LEE ,  Sang Hyon JEON ,  Kyung Hun JANG ,  Jeong Mo HWANG

IPC: H01L21/67 ,  G01K15/00 ,  G01K7/14

CPC classification number: H01L21/67248 ,  G01K15/005 ,  G01K7/14

Abstract: The inventive concepts provide a temperature controller for performing a comparative measurement process and a sensing calibration process without separating a temperature sensor and an input channel, if a comparative measurement process and a sensing calibration process of a temperature sensor for controlling a temperature of a semiconductor manufacturing facility are performed.