公开(公告)号：US20240153831A1

公开(公告)日：2024-05-09

申请号：US18382042

申请日：2023-10-19

Applicant: SEMES CO., LTD.

Inventor： Yong Jun SEO ,  Su Jin CHAE ,  Sang Hyun SON ,  Sang Min HA ,  Young Sik BANG ,  Jeong Mo HWANG ,  Dong Ok AHN

IPC: H01L21/66 ,  G01F1/684 ,  G01F1/688 ,  G01F1/696

CPC classification number: H01L22/34 ,  G01F1/6845 ,  G01F1/6888 ,  G01F1/6965

Abstract: An apparatus and method for measuring air currents on the surface of a substrate, which can accurately measure the magnitude and direction of air currents on the surface of a wafer with wafer-type air current measurement sensors, are provided. The apparatus includes: a first air current measurement module measuring a magnitude of air currents on a surface of a first substrate, which is processed in accordance with a semiconductor manufacturing process; a second air current measurement module measuring a movement direction of the air currents; and a power module supplying power to the first and second air current measurement modules, wherein the first air current measurement module, the second air current measurement module, and the power module are mounted on a second substrate, which has the same shape as the first substrate.

公开(公告)号：US20230215746A1

公开(公告)日：2023-07-06

申请号：US18069634

申请日：2022-12-21

Applicant: SEMES CO., LTD.

Inventor： Dong Ok AHN ,  Myeong Geun LEE ,  Sang Hyon JEON ,  Kyung Hun JANG ,  Jeong Mo HWANG

IPC: H01L21/67 ,  G01K15/00 ,  G01K7/14

CPC classification number: H01L21/67248 ,  G01K15/005 ,  G01K7/14

Abstract: The inventive concepts provide a temperature controller for performing a comparative measurement process and a sensing calibration process without separating a temperature sensor and an input channel, if a comparative measurement process and a sensing calibration process of a temperature sensor for controlling a temperature of a semiconductor manufacturing facility are performed.