公开(公告)号：US20250112071A1

公开(公告)日：2025-04-03

申请号：US18980132

申请日：2024-12-13

Applicant: SEMES CO., LTD.

Inventor： Yong Bae CHOI ,  Ji Hyun PARK ,  Shin Young CHEONG

IPC: H01L21/673

Abstract: An apparatus of storing container includes a stocker including shelves being configured to support containers, respectively, a purging unit being configured to provide a purge gas for each of the shelves to purge the containers when the stocker is in a purge mode, and to provide the purge gas only for each of the shelves when the stocker is in a normal mode, an inspection unit being configured to inspect a purge quality of the purge gas provided to each of the shelves while the stocker is in the normal mode, and a control unit being configured to change the stocker between in the purge mode and in the normal mode, and being configured to control the purging unit according to a switch between the purge mode and the normal mode. Thus, the apparatus has improved operation efficiency.

公开(公告)号：US20220076974A1

公开(公告)日：2022-03-10

申请号：US17466270

申请日：2021-09-03

Applicant: SEMES CO., LTD.

Inventor： Yong Bae CHOI ,  Ji Hyun PARK ,  Shin Young CHEONG

IPC: H01L21/673

Abstract: An apparatus of storing container includes a stocker including shelves being configured to support containers, respectively, a purging unit being configured to provide a purge gas for each of the shelves to purge the containers when the stocker is in a purge mode, and to provide the purge gas only for each of the shelves when the stocker is in a normal mode, an inspection unit being configured to inspect a purge quality of the purge gas provided to each of the shelves while the stocker is in the normal mode, and a control unit being configured to change the stocker between in the purge mode and in the normal mode, and being configured to control the purging unit according to a switch between the purge mode and the normal mode. Thus, the apparatus has improved operation efficiency.

公开(公告)号：US20220058897A1

公开(公告)日：2022-02-24

申请号：US17406641

申请日：2021-08-19

Applicant: SEMES CO., LTD.

Inventor： Tae In KIM ,  Jong Seon JOEN ,  Hyun Seong MOON ,  Shin Young CHEONG

IPC: G07C5/10 ,  G07C5/00 ,  B66F9/06 ,  B66F17/00

Abstract: A vehicle inspection device includes a storing part and a diagnosing part. The storing part is configured to store operation information in response to operations of vehicles to transport and load/unload an article along a transfer path. The diagnosing part is configured to compare the operation information stored in the storing part with a reference operation information of a vehicle to diagnose symptom of abnormality in the vehicles.