公开(公告)号：US20250112071A1

公开(公告)日：2025-04-03

申请号：US18980132

申请日：2024-12-13

Applicant: SEMES CO., LTD.

Inventor： Yong Bae CHOI ,  Ji Hyun PARK ,  Shin Young CHEONG

IPC: H01L21/673

Abstract: An apparatus of storing container includes a stocker including shelves being configured to support containers, respectively, a purging unit being configured to provide a purge gas for each of the shelves to purge the containers when the stocker is in a purge mode, and to provide the purge gas only for each of the shelves when the stocker is in a normal mode, an inspection unit being configured to inspect a purge quality of the purge gas provided to each of the shelves while the stocker is in the normal mode, and a control unit being configured to change the stocker between in the purge mode and in the normal mode, and being configured to control the purging unit according to a switch between the purge mode and the normal mode. Thus, the apparatus has improved operation efficiency.

公开(公告)号：US20210395010A1

公开(公告)日：2021-12-23

申请号：US17349467

申请日：2021-06-16

Applicant: SEMES CO., LTD.

Inventor： Young Woo KIM ,  Jin Ho SONG ,  Yong Bae CHOI ,  Ji Hyun PARK

IPC: B65G1/137 ,  B25J13/08

Abstract: An article storage device includes a load port configured to load and unload a plurality of articles, a plurality of shelves configured to load the articles, a transportation robot configured to transport the articles between the load port and the shelves or between the shelves, a receiving part configured to receive operation commands of the transportation robot from an upper system, a calculating part configured to calculate a setting value of an order of priority with respect to the operation commands, and a control part configured to control the transportation robot to perform an operation command having a high setting value of an order of priority among the operation commands.

公开(公告)号：US20220076974A1

公开(公告)日：2022-03-10

申请号：US17466270

申请日：2021-09-03

Applicant: SEMES CO., LTD.

Inventor： Yong Bae CHOI ,  Ji Hyun PARK ,  Shin Young CHEONG

IPC: H01L21/673

Abstract: An apparatus of storing container includes a stocker including shelves being configured to support containers, respectively, a purging unit being configured to provide a purge gas for each of the shelves to purge the containers when the stocker is in a purge mode, and to provide the purge gas only for each of the shelves when the stocker is in a normal mode, an inspection unit being configured to inspect a purge quality of the purge gas provided to each of the shelves while the stocker is in the normal mode, and a control unit being configured to change the stocker between in the purge mode and in the normal mode, and being configured to control the purging unit according to a switch between the purge mode and the normal mode. Thus, the apparatus has improved operation efficiency.