公开(公告)号：US20250140533A1

公开(公告)日：2025-05-01

申请号：US18796952

申请日：2024-08-07

Applicant: SEMES CO., LTD.

Inventor： Soon Cheon CHO ,  Joon Hee LEE ,  Kyung Hwa JUNG ,  Ji Chul KANG ,  Jung Hoon PARK ,  Dong Uk KIM

IPC: H01J37/32 ,  H01L21/683

Abstract: Disclosed are a substrate support device and a method of controlling prevention of leakage of temperature control fluid. In a substrate support device that controls temperature through supply of temperature control fluid, a sealing member configured to be actively controlled in volume expansion taking into consideration a difference in coefficient of expansion between a fluid supply block supplying the temperature control fluid and an electrostatic chuck due to the materials thereof is employed, thereby preventing leakage of the temperature control fluid.