公开(公告)号：US20250079197A1

公开(公告)日：2025-03-06

申请号：US18815987

申请日：2024-08-27

Applicant: SEMES CO., LTD.

Inventor： Pil Kyun HEO ,  Min Woo KIM ,  Hyung Seok KANG ,  Anton KORIAKIN ,  Joon Hee LEE

IPC: H01L21/67 ,  H01L21/02

Abstract: Disclosed are an apparatus for treating a substrate and a method of treating a substrate using a supercritical fluid. The apparatus includes: a chamber for providing a treatment space for treating a substrate; and a treatment fluid supply unit for supplying a treatment fluid to the treatment space, in which treatment fluid supply unit includes: a tank for storing the treatment fluid; a heating unit for heating the treatment fluid in the tank to convert the treatment fluid from a first state to a second state; an inlet line for introducing the treatment fluid in the first state into the tank; a supply line for supplying the treatment fluid of the second state from the tank to the chamber; a circulation line for circulating the treatment fluid in the tank; a first valve installed in the circulation line; and a temperature drop member installed in the circulation line to lower a temperature of the treatment fluid flowing through the circulation line.

公开(公告)号：US20250140533A1

公开(公告)日：2025-05-01

申请号：US18796952

申请日：2024-08-07

Applicant: SEMES CO., LTD.

Inventor： Soon Cheon CHO ,  Joon Hee LEE ,  Kyung Hwa JUNG ,  Ji Chul KANG ,  Jung Hoon PARK ,  Dong Uk KIM

IPC: H01J37/32 ,  H01L21/683

Abstract: Disclosed are a substrate support device and a method of controlling prevention of leakage of temperature control fluid. In a substrate support device that controls temperature through supply of temperature control fluid, a sealing member configured to be actively controlled in volume expansion taking into consideration a difference in coefficient of expansion between a fluid supply block supplying the temperature control fluid and an electrostatic chuck due to the materials thereof is employed, thereby preventing leakage of the temperature control fluid.

公开(公告)号：US20250003536A1

公开(公告)日：2025-01-02

申请号：US18607484

申请日：2024-03-17

Applicant: SEMES CO., LTD.

Inventor： Joon Hee LEE ,  Wook Sang JANG ,  Dong Uk KIM

IPC: F16L23/22 ,  F16J15/10 ,  H01J37/32 ,  H01L21/683

Abstract: Proposed are a sealing member that prevents fluid leakage even in a cryogenic environment, a fluid supplying device including the sealing member, and a substrate processing apparatus including the fluid supplying device. A sealing member according to an embodiment includes a sealing jacket having a ring shape, an upper O-ring mounted on an upper surface of the sealing jacket, a lower O-ring mounted on a lower surface of the sealing jacket, and a pressure ring inserted into a receiving portion of the sealing jacket and pressing the upper surface and the lower surface.