Apparatus for aligning head module and system for treating substrate with the apparatus

    公开(公告)号:US11491781B2

    公开(公告)日:2022-11-08

    申请号:US17337966

    申请日:2021-06-03

    Inventor: Su Beom Jeon

    Abstract: A head alignment apparatus for determining a reference position using position synchronization and aligning a plurality of head modules according to the reference position, and a substrate treating system including the same are provided. The head alignment apparatus may include, a reference position determining unit for determining a first reference position of a head transfer, in which a plurality of inkjet head modules are installed; and a mounting position determining unit for determining a second reference position of the inkjet head module based on the first reference position so that the inkjet head module can be moved from a current position to a second reference position, wherein the reference position determining unit determines a first reference position using a first image sensor installed on the same plane as the inkjet head module and a second image sensor installed facing the inkjet head module.

    APPARATUS FOR ALIGNING HEAD MODULE AND SYSTEM FOR TREATING SUBSTRATE WITH THE APPARATUS

    公开(公告)号:US20210387450A1

    公开(公告)日:2021-12-16

    申请号:US17337966

    申请日:2021-06-03

    Inventor: Su Beom Jeon

    Abstract: A head alignment apparatus for determining a reference position using position synchronization and aligning a plurality of head modules according to the reference position, and a substrate treating system including the same are provided. The head alignment apparatus may include, a reference position determining unit for determining a first reference position of a head transfer, in which a plurality of inkjet head modules are installed; and a mounting position determining unit for determining a second reference position of the inkjet head module based on the first reference position so that the inkjet head module can be moved from a current position to a second reference position, wherein the reference position determining unit determines a first reference position using a first image sensor installed on the same plane as the inkjet head module and a second image sensor installed facing the inkjet head module.

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