DROPLET ANALYSIS UNIT AND SUBSTRATE TREATMENT APPARATUS INCLUDING THE SAME

    公开(公告)号:US20240034055A1

    公开(公告)日:2024-02-01

    申请号:US18347241

    申请日:2023-07-05

    CPC classification number: B41J2/04535 B41J2/0456 B41J29/17 B41J2202/15

    Abstract: A droplet analysis unit capable of measuring and digitizing the meniscus shape, motion, and position of ink droplets and a substrate treatment apparatus including the droplet analysis unit are provided. The substrate treatment apparatus includes: a process treatment unit supporting a substrate while the substrate is being treated; an inkjet head unit treating the substrate by ejecting a substrate treatment liquid onto the substrate using a plurality of nozzles; a gantry unit moving the inkjet head unit over the substrate; and a droplet analysis unit measuring a meniscus in each of the nozzles that is associated with the substrate treatment liquid, wherein the droplet analysis unit measures and quantifies three-dimensional (3D) information regarding the meniscus.

    MENISCUS MEASURING APPARATUS AND METHOD, SUBSTRATE PROCESSING APPARATUS

    公开(公告)号:US20230063647A1

    公开(公告)日:2023-03-02

    申请号:US17885552

    申请日:2022-08-11

    Abstract: A meniscus measuring method capable of quickly and accurately measuring meniscus positions in a plurality of nozzles of an inkjet head can be provided. The meniscus measuring method comprises providing a head unit capable of discharging ink through a plurality of nozzles, adhering ink remaining in the plurality of nozzles to a film to form a detection pattern on the film by bringing the film into close contact with the plurality of nozzles, measuring meniscus of ink remaining in the plurality of nozzles based on the detection pattern.

    PRINTING APPARATUS AND INK REFILL METHODE THEREOF

    公开(公告)号:US20230034437A1

    公开(公告)日:2023-02-02

    申请号:US17844838

    申请日:2022-06-21

    Abstract: A printing apparatus and an ink refill method thereof are provided. The printing apparatus may comprise a printing unit performing printing, and an ink filling unit filling ink in the printing unit in an upward manner, wherein the printing unit includes a printing ink receptor accommodating ink, a spray head spraying the ink, and a pressure controller controlling a pressure of a fluid for operation of the ink, and the ink filling unit includes a supply ink receptor filled with ink for supply to the printing unit, and an ink supply unit mounted on the spray head to supply the ink supplied from the supply ink receptor to the spray head.

    CHEMICAL LIQUID DISPENSING APPARATUS
    4.
    发明公开

    公开(公告)号:US20240316944A1

    公开(公告)日:2024-09-26

    申请号:US18418676

    申请日:2024-01-22

    CPC classification number: B41J2/17596 B41J2/17563 B41J2/18

    Abstract: Provided is a chemical liquid dispensing apparatus including: a head assembly including a channel unit through which a chemical liquid flows, and multiple nozzles through which the chemical liquid flows from the channel unit and dispensing the chemical liquid onto a substrate; and a pipe connected to the head assembly and through which the chemical liquid passes, wherein the channel unit includes a first flow path having a branched structure, and a second flow path connected to the first flow path and supplying the chemical liquid to the multiple nozzles.

    DROPLET ANALYSIS UNIT AND SUBSTRATE TREATMENT APPARATUS INCLUDING THE SAME

    公开(公告)号:US20240034056A1

    公开(公告)日:2024-02-01

    申请号:US18346984

    申请日:2023-07-05

    Abstract: A droplet analysis unit capable of measuring and digitizing the meniscus shape, motion, and position of ink droplets and a substrate treatment apparatus including the droplet analysis unit are provided. The substrate treatment apparatus includes: a process treatment unit supporting a substrate while the substrate is being treated; an inkjet head unit treating the substrate by ejecting a substrate treatment liquid onto the substrate using a plurality of nozzles; a gantry unit moving the inkjet head unit over the substrate; and a droplet analysis unit measuring a meniscus in each of the nozzles that is associated with the substrate treatment liquid, wherein the droplet analysis unit measures and quantifies three-dimensional (3D) information regarding the meniscus based on chromatic aberration.

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