公开(公告)号：US11527423B2

公开(公告)日：2022-12-13

申请号：US17501569

申请日：2021-10-14

Applicant: SEMES CO., LTD.

Inventor： Tae Hyun Park ,  Jae Young Jang ,  Kook Bong Lee

IPC: B41J2/045 ,  H01L21/67 ,  B41J11/46 ,  B41J11/00

Abstract: A method for setting a substrate processing apparatus having a head for dispensing ink includes aligning a position of at least one vision unit, by moving the vision unit above a reference mark and taking, by the vision unit, an image of the reference mark, in which the vision unit takes an image of a substrate, and the reference mark is made on the substrate processing apparatus and fixed in one position, and aligning at least one of a movement axis of the vision unit, a position of the substrate, or a movement axis of the substrate, by moving the vision unit or the substrate in a state in which the substrate having alignment marks made thereon is located under the vision unit and taking, by the vision unit, an image of the alignment marks.