公开(公告)号：US12083551B2

公开(公告)日：2024-09-10

申请号：US17884709

申请日：2022-08-10

申请人： SEMES CO., LTD.

发明人： Sang Min Lee ,  Woo Jin Chung ,  Ki Bong Kim

IPC分类号： B05C11/10 ,  B05C5/02 ,  H01L21/67

CPC分类号： B05C5/0225 ,  B05C11/1002 ,  B05C11/1031

摘要： The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a chamber providing a treating space; and a fluid supply unit supplying a treating fluid to the chamber, and wherein the fluid supply unit includes: a supply tank storing the treating fluid; a supply line connecting the supply tank and the chamber; and a plurality of valves installed at the supply line, and wherein any one valve among the plurality of valves is provided as a safety valve, and wherein the safety valve is opened after confirming that the chamber has been switched to a closed state when supplying the treating fluid from a tank to the chamber.