METHOD OF AUTOMATICALLY SETTING PURGE MODE OF STB AND SYSTEM FOR MANUFACTURING SEMICONDUCTOR WAFER

    公开(公告)号:US20230402296A1

    公开(公告)日:2023-12-14

    申请号:US18105662

    申请日:2023-02-03

    Inventor: Young Woo KIM

    CPC classification number: H01L21/67017 H01L21/67253 H01L21/67733

    Abstract: Provided are a method of automatically setting a purge mode of a side track buffer (STB) and a system for manufacturing a semiconductor wafer, and the method, performed by a system for manufacturing a semiconductor wafer including a side track buffer (STB) including a purge device for supplying inert gas to discharge a process gas of a FOUP, and a mode determination unit for determining a purge mode in which the purge device of the STB in which the FOUP is seated is able to be driven, includes identifying specifications of the purge device corresponding to a configuration of the purge device; and determining a drivable purge mode from among predetermined purge modes depending on the identified specifications of the purge device.

    FIREPROOF SHUTTER
    4.
    发明申请
    FIREPROOF SHUTTER 审中-公开

    公开(公告)号:US20190063144A1

    公开(公告)日:2019-02-28

    申请号:US16106509

    申请日:2018-08-21

    Abstract: Disclosed is a fireproof shutter for opening and closing a passage between an upper story and a lower story. The fireproof shutter includes a base panel having an opening corresponding to the passage, a door for opening and closing the opening, and a guide unit for guiding the door between an open position in which the door is opened and a closed position in which the door is closed and having a predetermined inclination such that the door is closed by its own weight.

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