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公开(公告)号:US12240699B2
公开(公告)日:2025-03-04
申请号:US17349467
申请日:2021-06-16
Applicant: SEMES CO., LTD.
Inventor: Young Woo Kim , Jin Ho Song , Yong Bae Choi , Ji Hyun Park
Abstract: An article storage device includes a load port configured to load and unload a plurality of articles, a plurality of shelves configured to load the articles, a transportation robot configured to transport the articles between the load port and the shelves or between the shelves, a receiving part configured to receive operation commands of the transportation robot from an upper system, a calculating part configured to calculate a setting value of an order of priority with respect to the operation commands, and a control part configured to control the transportation robot to perform an operation command having a high setting value of an order of priority among the operation commands.
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公开(公告)号:US10954714B2
公开(公告)日:2021-03-23
申请号:US16106509
申请日:2018-08-21
Applicant: SEMES CO., LTD.
Inventor: Seung Keun Jun , Young Woo Kim , Tae Youl Youn , Wang Hyeon Son
Abstract: Disclosed is a fireproof shutter for opening and closing a passage between an upper story and a lower story. The fireproof shutter includes a base panel having an opening corresponding to the passage, a door for opening and closing the opening, and a guide unit for guiding the door between an open position in which the door is opened and a closed position in which the door is closed and having a predetermined inclination such that the door is closed by its own weight.
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公开(公告)号:US12293927B2
公开(公告)日:2025-05-06
申请号:US18105662
申请日:2023-02-03
Applicant: SEMES CO., LTD.
Inventor: Young Woo Kim
IPC: H01L21/67 , H01L21/677
Abstract: Provided are a method of automatically setting a purge mode of a side track buffer (STB) and a system for manufacturing a semiconductor wafer, and the method, performed by a system for manufacturing a semiconductor wafer including a side track buffer (STB) including a purge device for supplying inert gas to discharge a process gas of a FOUP, and a mode determination unit for determining a purge mode in which the purge device of the STB in which the FOUP is seated is able to be driven, includes identifying specifications of the purge device corresponding to a configuration of the purge device; and determining a drivable purge mode from among predetermined purge modes depending on the identified specifications of the purge device.
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公开(公告)号:US09987747B2
公开(公告)日:2018-06-05
申请号:US15162775
申请日:2016-05-24
Applicant: SEMES CO., LTD.
Inventor: Gui Jin Hwang , Yeon Kyu Jeong , Young Woo Kim
CPC classification number: B25J9/163 , B25J9/1697 , G05B19/4189 , G05B2219/45057 , Y10S901/03
Abstract: Disclosed is a stocker for receiving a cassette. The stocker includes a shelf for receiving a cassette, a stocker robot, a teaching jig, and a teaching unit. The stocker robot includes a robot arm configured to load the cassette in the shelf and to unload the cassette from the shelf. The teaching jig is disposed in the shelf to teach the stocker robot. The teaching unit is disposed on the robot arm to acquire information for teaching the stocker robot using the teaching jig.
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