公开(公告)号：US20240316709A1

公开(公告)日：2024-09-26

申请号：US18584446

申请日：2024-02-22

Applicant: SEMES CO., LTD.

Inventor： Changhoon OK ,  Yonghyun LEE

IPC: B23Q3/155 ,  B23Q3/06 ,  H01L21/67

CPC classification number: B23Q3/1554 ,  B23Q3/069 ,  B23Q3/15503 ,  B23Q3/15553 ,  H01L21/67121 ,  H01L21/67271

Abstract: Provided is a tool changing apparatus and method capable of easily and safely changing various tools usable for a table device or a pickup device of an equipment depending on materials such as semiconductor chips or semiconductor packages, the tool changing apparatus including a target tool detachably mountable on an equipment depending on a type or size of semiconductor chips or semiconductor packages, and a coupling device mounted between the equipment and the target tool to detachably fix the target tool to the equipment, wherein the coupling device includes a stud mounted on the target tool or the equipment, and a clamping module mounted in the equipment or the target tool to clamp the stud.