CONTROL APPARATUS AND LOGISTICS SYSTEM INCLUDING THE SAME

    公开(公告)号:US20240144158A1

    公开(公告)日:2024-05-02

    申请号:US18384812

    申请日:2023-10-27

    申请人: SEMES CO., LTD.

    IPC分类号: G06Q10/0832 G01C3/00

    CPC分类号: G06Q10/0832 G01C3/00

    摘要: A control apparatus for automating teaching between a gas cylinder transport apparatus and a gas cylinder storage apparatus and a logistics system including the control apparatus are provided. The logistics system includes: a gas cylinder transport apparatus transferring gas cylinders containing process gases; a gas cylinder storage apparatus storing the gas cylinders; and a control apparatus controlling the gas cylinder transport apparatus and the gas cylinder storage apparatus, wherein the control apparatus performs auto-teaching for operations between the gas cylinder transport apparatus and the gas cylinder storage apparatus.

    GAS SUPPLY AUTOMATION SYSTEM
    2.
    发明公开

    公开(公告)号:US20240198525A1

    公开(公告)日:2024-06-20

    申请号:US18530863

    申请日:2023-12-06

    申请人: SEMES CO., LTD.

    发明人: Yoon Whoi KIM

    IPC分类号: B25J9/16 B25J19/02 H01L21/67

    摘要: Embodiments of the inventive concept provide a gas supply automation system for automatically removing a protective cap which is mounted on a valve side of a gas cylinder.
    The inventive concept provides gas supply automation system for automatically transferring and supplying a gas cylinder. The gas supply automation system includes a multi-joint robot for gripping and transferring the gas cylinder positioned at a first position to a second position, and taking off a protective cap of the gas cylinder at the second position.