公开(公告)号：US20220197318A1

公开(公告)日：2022-06-23

申请号：US17554625

申请日：2021-12-17

Applicant: SEMES CO., LTD.

Inventor： Sang Bo SEO ,  Soo Hyang KANG ,  Young Chul SHIN ,  Chung Woo LEE

IPC: G05D23/19 ,  G05D23/24 ,  H05B3/26 ,  H05B1/02 ,  G01K7/16

Abstract: A temperature adjustment apparatus configured to perform temperature adjustment and control for each fine zone of a substrate, a multi-zone temperature adjustment apparatus including the same, and a multi-zone temperature adjustment type substrate supporting apparatus are proposed. The temperature adjustment apparatus includes a first power source, a second power source, an ammeter connected to the second power source in series and configured to measure a current value of the second power source, a heater inducing a first direction current to dissipate heat energy while being connected to the first power source in series during a heating time period, a temperature sensor inducing a second direction current while being connected to the second power source in series during a sensing time period, and a switch controller controlling connection between the first power source and the heater and connection between the second power source and the temperature sensor.