公开(公告)号：US08920562B2

公开(公告)日：2014-12-30

申请号：US13679391

申请日：2012-11-16

Applicant: Semiconductor Energy Laboratory Co., Ltd.

Inventor： Hisao Ikeda ,  Tomoya Aoyama ,  Takahiro Ibe ,  Yoshiharu Hirakata ,  Shunpei Yamazaki

IPC: C23C14/08 ,  C23C14/28 ,  B05C11/00 ,  C23C14/56 ,  C23C14/26 ,  C23C14/12 ,  C23C14/04 ,  H01L51/56 ,  H01L51/00

CPC classification number: B05C11/00 ,  C23C14/042 ,  C23C14/12 ,  C23C14/26 ,  C23C14/28 ,  C23C14/568 ,  H01L51/0081 ,  H01L51/56

Abstract: An object is to improve use efficiency of an evaporation material, to reduce manufacturing cost of a light-emitting device, and to reduce manufacturing time needed for a light-emitting device including a layer containing an organic compound. The pressure of a film formation chamber is reduced, a plate is rapidly heated by heat conduction or heat radiation by using a heat source, a material layer on a plate is vaporized in a short time to be evaporated to a substrate on which the material layer is to be formed (formation substrate), and then the material layer is formed on the formation substrate. The area of the plate that is heated rapidly is set to have the same size as the formation substrate and film formation on the formation substrate is completed by one application of heat.

Abstract translation: 本发明的目的在于提高蒸发材料的使用效率，降低发光元件的制造成本，减少含有有机化合物的层的发光元件所需的制造时间。 成膜室的压力减小，通过使用热源的热传导或热辐射快速加热板，在短时间内蒸发板上的材料层以蒸发到其上的材料层 （形成衬底），然后在形成衬底上形成材料层。 将快速加热的板的面积设定为与形成基板相同的尺寸，并且通过一次加热完成在形成基板上的成膜。

公开(公告)号：US08531104B2

公开(公告)日：2013-09-10

申请号：US13746593

申请日：2013-01-22

Applicant: Semiconductor Energy Laboratory Co., Ltd.

Inventor： Hisao Ikeda ,  Takahiro Ibe ,  Junichi Koezuka ,  Kaoru Kato

IPC: H01L51/50 ,  H01L51/52 ,  H01L51/54

CPC classification number: H01L51/52 ,  H01L27/3283 ,  H01L51/002 ,  H01L51/5052 ,  H01L51/5088 ,  H01L51/5215 ,  H01L2251/5392 ,  H01L2251/558

Abstract: The present invention provides a light-emitting device including a light-emitting element over a substrate, the light-emitting element is partitioned from an adjacent light-emitting element by a partition wall, the light-emitting element comprising a first electrode, a layer formed over the first electrode, a light-emitting layer formed over the layer and a second electrode formed over the light-emitting layer, the layer contains an inorganic compound, an organic compound and a halogen atom, the partition wall contains the inorganic compound and the organic compound, and the layer. The light-emitting device provides higher reliability and fewer defects.

Abstract translation: 本发明提供一种发光装置，其在基板上包括发光元件，所述发光元件通过分隔壁与相邻的发光元件分隔开，所述发光元件包括第一电极，层 形成在第一电极上，形成在该层上的发光层和形成在发光层上的第二电极，该层包含无机化合物，有机化合物和卤素原子，分隔壁包含无机化合物和 有机化合物和层。 发光装置提供更高的可靠性和更少的缺陷。

公开(公告)号：US20130134404A1

公开(公告)日：2013-05-30

申请号：US13746593

申请日：2013-01-22

Applicant: SEMICONDUCTOR ENERGY LABORATORY CO. LTD.

Inventor： Hisao IKEDA ,  Takahiro Ibe ,  Junichi Koezuka ,  Kaoru Kato

IPC: H01L51/52

CPC classification number: H01L51/52 ,  H01L27/3283 ,  H01L51/002 ,  H01L51/5052 ,  H01L51/5088 ,  H01L51/5215 ,  H01L2251/5392 ,  H01L2251/558

Abstract: The present invention provides a light-emitting device including a light-emitting element over a substrate, the light-emitting element is partitioned from an adjacent light-emitting element by a partition wall, the light-emitting element comprising a first electrode, a layer formed over the first electrode, a light-emitting layer formed over the layer and a second electrode formed over the light-emitting layer, the layer contains an inorganic compound, an organic compound and a halogen atom, the partition wall contains the inorganic compound and the organic compound, and the layer. The light-emitting device provides higher reliability and fewer defects.

公开(公告)号：US20130074763A1

公开(公告)日：2013-03-28

申请号：US13679391

申请日：2012-11-16

Applicant: Semiconductor Energy Laboratory Co., Ltd.

Inventor： Hisao Ikeda ,  Tomoya Aoyama ,  Takahiro Ibe ,  Yoshiharu Hirakata ,  Shunpei Yamazaki

IPC: B05C11/00

CPC classification number: B05C11/00 ,  C23C14/042 ,  C23C14/12 ,  C23C14/26 ,  C23C14/28 ,  C23C14/568 ,  H01L51/0081 ,  H01L51/56

Abstract: An object is to improve use efficiency of an evaporation material, to reduce manufacturing cost of a light-emitting device, and to reduce manufacturing time needed for a light-emitting device including a layer containing an organic compound. The pressure of a film formation chamber is reduced, a plate is rapidly heated by heat conduction or heat radiation by using a heat source, a material layer on a plate is vaporized in a short time to be evaporated to a substrate on which the material layer is to be formed (formation substrate), and then the material layer is formed on the formation substrate. The area of the plate that is heated rapidly is set to have the same size as the formation substrate and film formation on the formation substrate is completed by one application of heat.

Abstract translation: 本发明的目的在于提高蒸发材料的使用效率，降低发光元件的制造成本，减少含有有机化合物的层的发光元件所需的制造时间。 成膜室的压力减小，通过使用热源的热传导或热辐射快速加热板，在短时间内蒸发板上的材料层以蒸发到其上的材料层 （形成衬底），然后在形成衬底上形成材料层。 将快速加热的板的面积设定为与形成基板相同的尺寸，并且通过一次加热完成在形成基板上的成膜。