专利检索 ap:("SEOUL NATIONAL UNIVERSITY R&DB FOUNDATION") AND inv:"Ki-Ju KIM" 第 1 页

1.

发明申请
METHOD FOR MANUFACTURING SAMPLE FOR THIN FILM PROPERTY MEASUREMENT AND ANALYSIS, AND SAMPLE MANUFACTURED THEREBY 有权

公开(公告)号：US20210278355A1

公开(公告)日：2021-09-09

申请号：US16326616

申请日：2017-07-21

申请人： SEOUL NATIONAL UNIVERSITY R&DB FOUNDATION

发明人： Ki-Bum KIM , Min-Sik KIM , Hyun-Mi KIM , Ki-Ju KIM

IPC分类号： G01N27/04 , G01N1/28 , G01N23/04 , G01N23/06 , H01L21/304 , H01L21/306 , H01L21/308 , H01L21/02

摘要： The present invention relates to a method for manufacturing a sample for thin film property measurement and analysis, and a sample manufactured thereby and, more specifically, to: a method for manufacturing a sample capable of measuring or analyzing various properties in one sample; and a sample manufactured thereby.