公开(公告)号：US20190227430A1

公开(公告)日：2019-07-25

申请号：US16370927

申请日：2019-03-30

申请人： SHANDONG UNIVERSITY OF SCIENCE AND TECHNOLOGY

发明人： Qing WANG ,  Jintao ZHANG ,  Rui ZHANG ,  Xu ZHENG ,  Lijun MA ,  Xingyuan ZHANG ,  Wenquan DU

IPC分类号： G03F7/00 ,  B82Y40/00 ,  B29C59/02

摘要： A mold with cavities for nanoimprint lithography and a method of imprinting the same. The mold is a one-piece structure, including an upper mold and a lower mold which are welded together. The upper mold is evenly provided with a plurality of stepped holes. A plurality of grooves are provided at an upper surface of the lower mold. Both ends of each groove are respectively connected to an external high-pressure water pump and an external vacuum pump via pipelines. An airtight cavity is additionally provided at the interior of the mold to form a negative pressure in the cavity by vacuumizing during the imprint process. In the demolding, a crack is formed at the interface between the mold and the imprint resist by using water pressure and expands to the entire interface for the demolding of the imprinted structure.

公开(公告)号：US20210039282A1

公开(公告)日：2021-02-11

申请号：US16475866

申请日：2018-08-24

申请人： SHANDONG UNIVERSITY OF SCIENCE AND TECHNOLOGY

发明人： Qing WANG ,  Rui ZHANG ,  Xu ZHENG ,  Ning WANG

IPC分类号： B29C33/30 ,  G01B11/16 ,  B29C39/36

摘要： Disclosed is a method of preparing a flexible deformable photonic crystal material for structural health monitoring, comprising the following steps: washing a grating master template; preparing and assembling a mold; obtaining an assembled mold by printing a three-dimensional mold comprising an upper die and a lower die by use of a 3D printing device and installing the grating master template on the three-dimensional mold; obtaining a polydimethylsiloxane (PDMS) one-dimensional photonic crystal film by replicating a one-dimensional grating structure of a surface of the grating master template by pouring PDMS into the assembled mold; finally, obtaining the PDMS one-dimensional photonic crystal film with a one-dimensional photonic crystal structure on a middle surface and protrusion structures at both ends by demolding, wherein the PDMS one-dimensional photonic crystal film is the flexible deformable photonic crystal material. A mechanochromic photonic crystal film is prepared by using a master template with a photonic crystal structure, a process is simple and easy to operate, a preparation period of a mechanochromic material is greatly shortened, and a preparation cost is reduced.