公开(公告)号：US11955357B2

公开(公告)日：2024-04-09

申请号：US17367526

申请日：2021-07-05

Applicant: SHANGHAITECH UNIVERSITY

Inventor： Yong Yang ,  Xiaohong Zhou ,  Evgeny Vovk ,  Jiafeng Zhao

IPC: H01L21/67 ,  H01L21/673

CPC classification number: H01L21/67248 ,  H01L21/67103 ,  H01L21/67379

Abstract: The present disclosure relates to an in-situ temperature control platform, including an independent sample holder, a sample holder fixing cartridge, a customized sample stage and an anode contact pin. The independent sample holder includes a sample loading spot and a sample holder grip. The sample holder fixing cartridge includes a fixing cartridge body, the fixing cartridge body is provided with a sample holder slot, the bottom surface of the sample holder slot is provided with a heating element slot, and the sample holder slot is aligned with the sample loading spot. The bottom surface of the heating element slot is provided with a heating element fixing pinhole. The customized sample stage includes a sample stage body, the sample stage body is provided with a heating element support, and the heating element support is provided with a heating element.