公开(公告)号：US11955357B2

公开(公告)日：2024-04-09

申请号：US17367526

申请日：2021-07-05

Applicant: SHANGHAITECH UNIVERSITY

Inventor： Yong Yang ,  Xiaohong Zhou ,  Evgeny Vovk ,  Jiafeng Zhao

IPC: H01L21/67 ,  H01L21/673

CPC classification number: H01L21/67248 ,  H01L21/67103 ,  H01L21/67379

Abstract: The present disclosure relates to an in-situ temperature control platform, including an independent sample holder, a sample holder fixing cartridge, a customized sample stage and an anode contact pin. The independent sample holder includes a sample loading spot and a sample holder grip. The sample holder fixing cartridge includes a fixing cartridge body, the fixing cartridge body is provided with a sample holder slot, the bottom surface of the sample holder slot is provided with a heating element slot, and the sample holder slot is aligned with the sample loading spot. The bottom surface of the heating element slot is provided with a heating element fixing pinhole. The customized sample stage includes a sample stage body, the sample stage body is provided with a heating element support, and the heating element support is provided with a heating element.

公开(公告)号：US10830741B1

公开(公告)日：2020-11-10

申请号：US16966017

申请日：2018-04-25

Applicant: SHANGHAITECH UNIVERSITY

Inventor： Yong Yang

IPC: G01N1/00 ,  G01N30/72 ,  H01J49/42

Abstract: A coupling structure of a UHV characterization instrument-interconnected in-situ reaction cell and a built-in mass spectrometer electro quadrupole is provided. One end of a stainless steel capillary is connected to a segregated in-situ reaction cell gas output pipeline, and the other end of the stainless steel capillary is a sampling port. A sampling gas flowing out of the sampling port is divided into two gas paths, wherein, one gas path enters a vacuum buffer chamber through a valve with a low flow control ratio, and the other gas path enters a mass spectrometer electro quadrupole through a valve with a high flow control ratio. When the mass spectrometer electro quadrupole performs sampling gas composition analysis on the interconnected in-situ reaction cell, its sampling time delay is negligible and the sampling analysis requirements for in-situ analysis of continuity, real-time and high time resolution are met.

公开(公告)号：US11435301B2

公开(公告)日：2022-09-06

申请号：US16613801

申请日：2018-05-25

Applicant: SHANGHAITECH UNIVERSITY

Inventor： Yong Yang ,  Zebang Liu ,  Jerry Pui Ho Li ,  Evgeny Vovk

IPC: G01N23/207 ,  H01J49/04 ,  H01J49/24

Abstract: A reaction control and mass spectrometry workstation for coupling an X-ray spectroscopic characterization instrument with an in-situ reaction cell, including a reactant gas composition control module and an online gas composition analyzing module. The workstation further involves a modification based on the original vacuum pipeline section. After the modification, the original vacuum pipeline section is connected to three customized gas ports, and the modification is characterized in that the vacuum manifold unit is additionally provided with a mass spectrometer sampling port, a sampling capillary, and control valves. The present disclosure has the following advantages. The sampling time delay can be ignored in the mass spectrometry, and the sampling is continuous real-time in-situ analysis with high time resolution. Under the working conditions of the X-ray spectroscopic characterization instrument, the electronic structure/crystal structure information and the precise information of the ambient gas composition are obtained simultaneously.