公开(公告)号：US20200025643A1

公开(公告)日：2020-01-23

申请号：US16587737

申请日：2019-09-30

Applicant: SHIBAURA MECHATRONICS CORPORATION

Inventor： Masataka YOKOI ,  Nobuo KOBAYASHI ,  Masaaki FURUYA ,  Atsushi KINASE

IPC: G01M3/28 ,  H05B3/06

Abstract: According to one of embodiments, a gas leak detecting device of a heater pipe and a gas leak detecting method of a heater pipe which are able to reliably detect a leak of gas from a heater pipe in which a fine hole is formed are provided. There is provided a gas leak detecting device of a heater pipe 10 which is provided with an inside pipe 10a housing a heater element and an outside pipe 10b sealed surrounding this inside pipe and which is adjusted through piping 30 by a pressure adjustment mechanism 20 in gas pressure in a space between the outside pipe 10b and the inside pipe 10a to a predetermined pressure value, comprising a gas flow resistance part 21 (213) provided at the piping 30 and locally resistant to flow of gas, a pressure detection unit 23 detecting gas pressure of a space between the outside pipe 10b and the inside pipe 10a between the gas flow resistance part 21 and the heater pipe 10 in the piping 30, and a leak judging means 50 for judging whether gas is leaking from the heater pipe 10 based on a detected pressure value obtained by the pressure detection unit 23.