公开(公告)号：US20230194339A1

公开(公告)日：2023-06-22

申请号：US17994387

申请日：2022-11-28

Applicant: Shimadzu Corporation

Inventor： Naoya FUJIWARA ,  Yuka MORITANI

IPC: G01J3/02 ,  G01J3/10 ,  G01J3/44 ,  G01J3/28

CPC classification number: G01J3/0237 ,  G01J3/108 ,  G01J3/4412 ,  G01J3/2823 ,  G01J2003/106

Abstract: In a Raman microscope, a depth measurement processor performs depth measurement by changing a focal position of laser light along a depth direction of a sample which is an irradiation direction of the laser light with respect to the sample, and meanwhile, acquiring a Raman spectrum of the sample at a plurality of points in the depth direction. A display processor displays an input screen used to input a parameter at a time of performing the depth measurement on the sample in association with a surface image of the sample on a stage. The parameter includes a range in which the focal position of the laser light is changed along the depth direction and an interval between the plurality of points within the range.

公开(公告)号：US20250110324A1

公开(公告)日：2025-04-03

申请号：US18728427

申请日：2022-12-21

Applicant: SHIMADZU CORPORATION

Inventor： Yuka MORITANI ,  Naoya FUJIWARA ,  Fumiya KATSUTANI ,  Tomoyo TAO

IPC: G02B21/36 ,  G01N21/65 ,  G02B21/16

Abstract: A camera captures a surface image of a sample. A reference position setting processing unit changes the focal position of the laser light with respect to the sample on a stage to set the focal position at which a spot area of the laser light on the surface image meets a predetermined first criterion as a reference position. A determination processing unit determines whether or not the light quantity incident on the slit provided in front of the detector meets a predetermined second criterion based on the change in the spot position of the laser light on the surface image by changing the focal position in the depth direction with respect to the reference position. An angle adjustment processing unit adjusts the angle of the mirror when it is determined that the light quantity incident on the slit does not meet the predetermined second criterion.