公开(公告)号：US20180135985A1

公开(公告)日：2018-05-17

申请号：US15808179

申请日：2017-11-09

Applicant: SHIN SUNG C&T CO., LTD.

Inventor： Ci Moo SONG ,  Keun Jung YOUN ,  Jeong Sik KANG ,  Yong Kook KIM ,  Seung Ho HAN ,  Hyun Ju SONG

IPC: G01C19/5712 ,  B81B3/00

CPC classification number: G01C19/5712 ,  B81B3/0062 ,  B81B7/02 ,  B81B2201/0242 ,  B81B2203/0163 ,  G01C19/5719 ,  G01C19/5747

Abstract: A MEMS gyroscope including: a frame arranged parallel to a bottom wafer substrate; a sensor mass body excited at one degree of freedom in an excitation mode, and of which the displacement is sensed at two degrees of freedom by a Coriolis force in a sensing mode when an external angular velocity is input to the frame; and at least two sensing electrode for sensing a displacement of the sensor mass body, the displacement being sensed at the two degrees of freedom, wherein the sensor mass body comprises an inner mass body and an outer mass body surrounding the inner mass body, the outer mass body and the frame are connected by a first support spring, and the outer mass body and the inner mass body are connected by a second support spring.

公开(公告)号：US20180135984A1

公开(公告)日：2018-05-17

申请号：US15808185

申请日：2017-11-09

Applicant: SHIN SUNG C&T CO., LTD.

Inventor： Ci Moo SONG ,  Keun Jung YOUN ,  Jeong Sik KANG ,  Yong Kook KIM ,  Seung Ho HAN ,  Hyun Ju SONG

IPC: G01C19/574 ,  G01C19/5712

CPC classification number: G01C19/574 ,  B81B7/02 ,  G01C19/5712 ,  G01C19/5747 ,  G01C19/5769

Abstract: A MEMS-based gyroscope including: a sensor frame disposed parallel to a bottom wafer substrate; a sensor mass body which relatively moves to the sensor frame, and is excited at one degree of freedom in an excitation mode; and at least one sensing electrode which senses displacement of the sensor mass body at the one degree of freedom in a sensing mode by Coriolis force, when an external angular velocity is input to the sensor mass body, wherein the sensor mass body includes two mass units, the two mass units are arranged in line symmetry with each other, and the antiphase motion of the two mass units is maintained by an antiphase link mechanism directly or indirectly connected between the two mass units.