公开(公告)号：US20070266780A1

公开(公告)日：2007-11-22

申请号：US11737779

申请日：2007-04-20

申请人： SHUICHI BABA ,  Masahiro Watanabe ,  Toshihiko Nakata ,  Toru Kurenuma ,  Hiroshi Kuroda ,  Takafumi Morimoto ,  Yukio Kembo ,  Manabu Edamura

发明人： SHUICHI BABA ,  Masahiro Watanabe ,  Toshihiko Nakata ,  Toru Kurenuma ,  Hiroshi Kuroda ,  Takafumi Morimoto ,  Yukio Kembo ,  Manabu Edamura

IPC分类号： G01N13/10

CPC分类号： G01Q60/28 ,  G01Q10/06 ,  G01Q30/04

摘要： With a scanning probe microscope, if a plurality of sample properties are measured using a scanning scheme of allowing a probe to approach and withdraw from a sample, the sample properties need to be accurately and reliably detected in the minimum required measurement time. Further, the acting force between the probe and the sample varies depending on the type of the probe and the wear condition of a probe tip. Thus, disadvantageously, property values acquired using different probes cannot be compared with one another unless the artifactual effect of the measuring probes are eliminated. In accordance with the present invention, with a scanning probe microscope, the probe is brought into intermittent contact with the sample, while driving means repeatedly allows the probe to approach and withdraw from the sample with a variable amplitude. The sample property is thus acquired at a high speed. Further, a calibration sample is used in a given environment (given temperature and humidity) to acquire a force curve for at least one point. Information obtained from the force curve is used to correct measurements to display the distribution of the sample property.

摘要翻译： 使用扫描探针显微镜，如果使用允许探针进入和退出样本的扫描方案测量多个样品特性，则需要在最小所需测量时间内精确可靠地检测样品性质。 此外，探针和样品之间的作用力根据探针的类型和探针尖端的磨损情况而变化。 因此，不利的是，使用不同探针获得的特性值不能相互比较，除非消除了测量探针的人为影响。 根据本发明，利用扫描探针显微镜，使探针与样品间歇接触，同时驱动装置反复允许探针以可变的幅度从样品接近和退出。 因此，以高速度获取样品特性。 此外，在给定的环境（给定的温度和湿度）中使用校准样品以获得至少一个点的力曲线。 从力曲线获得的信息用于校正测量值以显示样品属性的分布。