公开(公告)号：US20240145285A1

公开(公告)日：2024-05-02

申请号：US18383938

申请日：2023-10-26

Applicant: Sinfonia Technology Co., Ltd.

Inventor： Tatsuru Ogawa ,  Yuki Ishihara ,  Shinpei Kogiso ,  Atsushi Suzuki ,  Yuki Matsumoto ,  Tatsuya Miura

IPC: H01L21/677

CPC classification number: H01L21/67706 ,  H01L21/67772

Abstract: A load port includes: a plate-shaped base member having an opening via which a transfer target object is loaded and unloaded; a door member capable of opening and closing the opening; a link mechanism including a link member having one end rotatably connected to the door member; a guide roller configured to move together with the door member; a guide surface bent to extend from a first direction to a second direction and configured to guide the guide roller; a drive member to which the other end of the link member is rotatably connected; and a driver configured to move the drive member in the second direction.

公开(公告)号：US20230415936A1

公开(公告)日：2023-12-28

申请号：US18212791

申请日：2023-06-22

Applicant: Sinfonia Technology Co., Ltd.

Inventor： Tatsuya Miura ,  Shinpei Kogiso ,  Yuki Ishihara ,  Tatsuru Ogawa ,  Atsushi Suzuki ,  Yuki Matsumoto

IPC: B65B7/16 ,  B65B69/00

CPC classification number: B65B7/16 ,  B65B69/00

Abstract: A load port connected to a transport part includes: a base constituting a portion of a wall of the transport part; a stage on which a storage container is mounted; a stage driving mechanism configured to move the stage in a direction toward or away from the base; a door configured to be capable of opening/closing an opening of the base at a position facing a lid of the storage container mounted on the stage and to be capable of holding the lid disposed to face the opening in a state of closing the opening; a door driving mechanism configured to move the door between an opening position and a closing position; and a movement restricting part configured to restrict a movement of the stage in the direction away from the base by abutting against the stage.

公开(公告)号：US09916997B2

公开(公告)日：2018-03-13

申请号：US15072823

申请日：2016-03-17

Applicant: SINFONIA TECHNOLOGY CO., LTD.

Inventor： Toshimitsu Morihana ,  Yuki Matsumoto ,  Mitsuo Natsume

IPC: H01L21/67 ,  H01L21/673

CPC classification number: H01L21/67393

Abstract: There is provided an end structure of a nozzle (11) including a gas-flow passage (13) communicable with an opening (104) provided through a bottom of a container (100) configured to contain an object, the nozzle (11) configured so that gas is injected into or discharged from the container (100) through the gas-flow passage (13) and the opening (104). The end structure includes a contact portion (19) provided at an upper end portion of the nozzle (11) and around the gas-flow passage (13), and the contact portion (19) is configured to be brought into contact with a contacted portion (103) provided around the opening (104). The contact portion (19) includes a flat portion (19b) and protruding portions (19a and 19c) each protruding upward relative to the flat portion (19b), and the flat portion (19b) is made of material softer than that of the protruding portions (19a and 19c).

公开(公告)号：US20230395416A1

公开(公告)日：2023-12-07

申请号：US18205874

申请日：2023-06-05

Applicant: Sinfonia Technology Co., Ltd.

Inventor： Tatsuru Ogawa ,  Yuki Ishihara ,  Shinpei Kogiso ,  Tatsuya Miura ,  Atsushi Suzuki ,  Yuki Matsumoto

IPC: H01L21/677

CPC classification number: H01L21/67775 ,  H01L21/67778 ,  H01L21/67772 ,  H01L21/67793

Abstract: A load port for loading and unloading substrates between a transport chamber and a storage container includes: a plate-like portion constituting a wall surface of the transport chamber and including an opening in communication with an interior of the transport chamber; a stage configured to mount the storage container thereon such that a lid of the storage container faces a door of the opening; and a controller configured to control a driving device that moves the stage forward and rearward with respect to the plate-like portion, wherein the controller is further configured to control, when moving the stage toward the plate-like portion, the driving device to: apply a first thrust directed toward the plate-like portion to the stage until immediately before the stage reaches a predetermined position; and then apply a second thrust, which is greater than the first thrust and directed toward the plate-like portion, to the stage.