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1.发明授权Method for manufacturing a suspended single carbon nanowire and piled nano-electrode pairs 有权制造悬浮单碳纳米线和堆叠纳米电极对的方法公开(公告)号：US09513555B2
公开(公告)日：2016-12-06
申请号：US14781261
申请日：2014-03-28
发明人： Heung-Joo Shin , Jeong-Il Heo , Yeong-Jin Lim
CPC分类号： G03F7/40 , B82Y15/00 , B82Y40/00 , G01N27/3278 , G01N33/0004 , G03F7/0035 , G03F7/038 , G03F7/203
摘要： The present invention provides a method for manufacturing a suspended single carbon nanowire and piled nano-electrode pairs, and a suspended single carbon nanowire and piled nano-electrode pairs manufactured using said method. A suspended single carbon nanowire, which is manufactured at a high yield by the method for manufacturing a suspended single carbon nanowire according to the present invention, has a minimized dimension, and a suspended carbon nanomesh, which is manufactured at a high yield by the method for manufacturing piled nano-electrode pairs according to the present invention, is thin and dense. The present invention also provides a gas sensor or an electrochemical sensor, to which a suspended single carbon nanowire and piled nano-electrode pairs manufactured by the method according to the present invention are applied.
摘要翻译： 本发明提供一种制造悬浮单碳纳米线和堆叠的纳米电极对的方法，以及使用所述方法制造的悬浮单碳纳米线和堆叠的纳米电极对。 通过根据本发明的悬浮单碳纳米线的制造方法以高产率制造的悬浮单碳纳米线具有最小尺寸，并且通过该方法以高产率制造的悬浮碳纳米线 用于制造根据本发明的堆叠的纳米电极对，薄而致密。 本发明还提供了一种气体传感器或电化学传感器，其中应用了通过根据本发明的方法制造的悬浮的单个碳纳米线和堆叠的纳米电极对。
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公开(公告)号：US10132768B2
公开(公告)日：2018-11-20
申请号：US14895702
申请日：2014-08-29
发明人： Heung-Joo Shin , Yeong Jin Lim , Jeong Il Heo
摘要： Provided is a method for manufacturing a gas sensor according to an exemplary embodiment of the present invention including: a) forming a pair of photoresist electrodes spaced apart from each other and a photoresist wire connecting upper portions of the pair of photoresist electrodes to each other by exposing and developing a first photoresist coated on a substrate; b) forming a pair of carbon electrodes and a carbon wire that are connected to be integrated with each other, by pyrolyzing the pair of photoresist electrodes and the photoresist wire; and c) forming metal oxide nanowires on a surface of the carbon wire.
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