公开(公告)号：US10366899B2

公开(公告)日：2019-07-30

申请号：US15626250

申请日：2017-06-19

Applicant: SPTS TECHNOLOGIES LIMITED

Inventor： Oliver J Ansell ,  David A Tossell ,  Gautham Ragunathan

IPC: H01S5/02 ,  H01L41/338 ,  H01L21/78 ,  H01L21/683 ,  H01L21/67 ,  H01L21/66 ,  H01L21/3213 ,  H01L21/3065 ,  H01J37/32

Abstract: A method is for detecting a condition associated with a final phase of a plasma dicing process. The method includes providing a non-metallic substrate having a plurality of dicing lanes defined thereon, plasma etching through the substrate along the dicing lanes, wherein during the plasma etching infrared emission emanating from at least a portion of the dicing lanes is monitored so that an increase in infrared emission from the dicing lanes is observed as the final phase of the plasma dicing operation is entered, and detecting the condition associated with the final phase of the plasma dicing from the monitored infrared emission.