公开(公告)号：US20220205898A1

公开(公告)日：2022-06-30

申请号：US17563644

申请日：2021-12-28

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Francesco FONCELLINO

IPC: G01N15/10 ,  B81B3/00 ,  G01N15/06

Abstract: A MEMS sensing device for sensing microparticles in an environment external to the MEMS sensing device is provided. The MEMS sensing device comprises a semiconductor body integrating a sensor and a pump unit, the sensor including a sensor cavity, a membrane suspended over the sensor cavity, and a piezoelectric element over the membrane and configured to cause the membrane to oscillate, about an equilibrium position, at a corresponding resonance frequency when sensing electric signals are applied to the piezoelectric element during a first operative phase of the MEMS sensing device, the resonance frequency depending on an amount of microparticles located on the membrane, the membrane having a plurality of through holes for establishing a fluid communication between the sensor cavity and the environment; the pump is configured to cause air pressure in the sensor cavity to be reduced with respect to the air pressure of the environment during the first operative phase, so that microparticles are caused to adhere onto the membrane by a suction force through the plurality of through holes.

公开(公告)号：US20240075499A1

公开(公告)日：2024-03-07

申请号：US18455540

申请日：2023-08-24

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Francesco FONCELLINO

IPC: B06B1/02 ,  G01S7/534

CPC classification number: B06B1/0292 ,  G01S7/534

Abstract: MEMS ultrasonic transducer, MUT, device, comprising a semiconductor body with a first and a second main face, including: a modulation cavity extending into the semiconductor body from the second main face; a membrane body suspended on the modulation cavity and comprising a transduction membrane body and a modulation membrane body; a piezoelectric modulation structure on the modulation membrane body; a transduction cavity extending into the membrane body, the transduction membrane body being suspended on the transduction cavity; and a piezoelectric transduction structure on the transduction membrane body. The modulation membrane body has a first thickness and the transduction membrane body has a second thickness smaller than the first thickness. In use, the modulation membrane vibrates at a first frequency and the transduction membrane vibrates at a second frequency higher than the first frequency, to emit and/or receive acoustic waves at a frequency dependent on the first and the second frequencies.

公开(公告)号：US20220381739A1

公开(公告)日：2022-12-01

申请号：US17824586

申请日：2022-05-25

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Francesco FONCELLINO ,  Luigi BARRETTA

IPC: G01N29/02 ,  G01N29/036 ,  G01N29/22

Abstract: A MEMS device for detecting particulate and gases in the air, comprising: a first semiconductor body; a second semiconductor body with a first surface facing a first surface of the first semiconductor body; and a first spacer element and a second spacer element, which extend between the first surfaces of the semiconductor bodies so as to arrange them at a distance apart from one another and define a first duct. The MEMS device further comprises at least one of the following: a first particulate sensor comprising a first emitter unit for generating acoustic waves in the first duct, and a first particulate-detection unit for detecting the particulate, the first emitter unit and the first particulate-detection unit facing one another through the first duct; and a first gas sensor, which faces the first duct and is configured to detect said gases in the air present in the first duct.

公开(公告)号：US20180178251A1

公开(公告)日：2018-06-28

申请号：US15626824

申请日：2017-06-19

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Francesco FONCELLINO ,  Flavio Francesco VILLA ,  Andrea DI MATTEO

IPC: B06B1/06 ,  H01L41/113 ,  B06B1/02 ,  H01L41/293 ,  H01L41/332

CPC classification number: B06B1/0622 ,  B06B1/0207 ,  B06B1/06 ,  G01H11/08 ,  G10K9/122 ,  G10K13/00 ,  H01L41/1138 ,  H01L41/293 ,  H01L41/332

Abstract: A piezoelectric micro-machined ultrasonic transducer (PMUT) comprising: a semiconductor body having a first cavity and a membrane, which is suspended over the first cavity and faces a front side of the semiconductor body; and a piezoelectric transducer assembly extending at least in part on the membrane, which may be actuated for generating a deflection of the membrane. A second cavity extends buried in a peripheral region of the membrane and delimits a central region of the membrane. Moreover, the peripheral portion has a stiffness lower than the stiffness of the central portion.