-
公开(公告)号:US10941880B2
公开(公告)日:2021-03-09
申请号:US16295410
申请日:2019-03-07
Applicant: STMicroelectronics S.r.l.
Inventor: Domenico Giusti , Oriana Rita Antonia Di Marco , Igor Varisco
Abstract: A valve module includes a semiconductor body, cavities in the semiconductor body separated from each other by a distance, a cantilever structure suspended over each cavity to enable at least partial closing of the cavity, and a piezoelectric actuator for each cantilever structure. The piezoelectric actuator is configured for use to cause a positive bending of the respective cantilever structure and so modulate a rate of air flow through the valve module.
-
公开(公告)号:US11484669B2
公开(公告)日:2022-11-01
申请号:US16408362
申请日:2019-05-09
Applicant: STMICROELECTRONICS S.R.L.
Inventor: Oriana Rita Antonia Di Marco , Domenico Giusti
Abstract: A microfluidic dispenser device of inhalable substances includes a casing, housed in which are a driving circuit and a microfluidic cartridge having a tank that contains a liquid to be delivered. The microfluidic cartridge is provided with at least one nebulizer controlled by the driving device. The nebulizer includes: a substrate; a plurality of chambers formed on the substrate and fluidically coupled to the tank for receiving the liquid to be delivered; and a plurality of heaters, which are formed on the substrate in positions corresponding to respective chambers, are thermally coupled to the respective chambers and are separated from the respective chambers by an insulating layer, and are controlled by the driving device. Each chamber is fluidically connected with the outside by at least one respective nozzle.
-
公开(公告)号:US12251508B2
公开(公告)日:2025-03-18
申请号:US17958723
申请日:2022-10-03
Applicant: STMICROELECTRONICS S.r.l.
Inventor: Oriana Rita Antonia Di Marco , Domenico Giusti
Abstract: A microfluidic dispenser device of inhalable substances includes a casing, housed in which are a driving circuit and a microfluidic cartridge having a tank that contains a liquid to be delivered. The microfluidic cartridge is provided with at least one nebulizer controlled by the driving device. The nebulizer includes: a substrate; a plurality of chambers formed on the substrate and fluidically coupled to the tank for receiving the liquid to be delivered; and a plurality of heaters, which are formed on the substrate in positions corresponding to respective chambers, are thermally coupled to the respective chambers and are separated from the respective chambers by an insulating layer, and are controlled by the driving device. Each chamber is fluidically connected with the outside by at least one respective nozzle.
-
-