公开(公告)号：US20160117015A1

公开(公告)日：2016-04-28

申请号：US14839604

申请日：2015-08-28

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Marco Veneri ,  Stefano Bosco ,  Alessandro Morcelli

IPC: G06F3/044 ,  G06F3/043 ,  G06F3/041

CPC classification number: G06F3/044 ,  B81B7/0058 ,  B81B2201/0285 ,  B81B2207/012 ,  G01H11/06 ,  G06F3/0412 ,  G06F3/0433 ,  H01L2224/48137

Abstract: A microelectromechanical vibration sensor includes: a first chamber; a second chamber; a semiconductor membrane between the first chamber and the second chamber; a reference electrode, capacitively coupled to the membrane; and a package structure, which encapsulates and insulates acoustically from the outside world the first chamber, the second chamber, and the membrane.

Abstract translation: 微机电振动传感器包括：第一室; 第二个房间 第一室和第二室之间的半导体膜; 电容耦合到膜的参比电极; 以及封装结构，其从外界在声学上封装并绝缘第一腔室，第二腔室和膜。

公开(公告)号：US11001496B2

公开(公告)日：2021-05-11

申请号：US16100767

申请日：2018-08-10

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Federico Iaccarino ,  Andrea Labombarda ,  Fabio Tota ,  Stefano Bosco

IPC: B81C99/00 ,  B81B7/00 ,  G01R31/317 ,  G01R31/28 ,  G01R31/30

Abstract: A microelectromechanical system (MEMS) sensor testing device, system and method are provided. The testing device includes a socket having a plurality of pads configured to receive a respective plurality of pins of the MEMS sensor, a body having a plurality of operable positions associated with a respective plurality of orientations of the MEMS sensor and circuitry which performs a method for testing the MEMS sensor in the plurality of operable positions. The method includes, for each position of the plurality of operable positions, outputting an indication of the position to the plurality of operable positions, receiving one or more measurements made by the MEMS sensor at the respective position and determining whether the one or more measurements satisfy a reliability criterion. The method includes generating a report based on the plurality of measurements and indicating whether the plurality of measurements satisfy a plurality of reliability criteria, respectively.