公开(公告)号：US20230036566A1

公开(公告)日：2023-02-02

申请号：US17868479

申请日：2022-07-19

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Daniele PRATI ,  Luca Giuseppe FALORNI ,  Luca GUERINONI

IPC: G01C19/5712

Abstract: The MEMS gyroscope is formed by a substrate, a first mass and a second mass, wherein the first and the second masses are suspended over the substrate and extend, at rest, in a plane of extension defining a first direction and a second direction transverse to the first direction. The MEMS gyroscope further has a drive structure coupled to the first mass and configured, in use, to cause a movement of the first mass in the first direction, and an elastic coupling structure, which extends between the first mass and the second mass and is configured to couple the movement of the first mass in the first direction with a movement of the second mass in the second direction. The elastic coupling structure has a first portion having a first stiffness and a second portion having a second stiffness greater than the first stiffness.

公开(公告)号：US20180106617A1

公开(公告)日：2018-04-19

申请号：US15858909

申请日：2017-12-29

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Daniele PRATI ,  Carlo VALZASINA ,  Luca Giuseppe FALORNI ,  Matteo Fabio BRUNETTO

IPC: G01C19/5733 ,  G01C19/5762 ,  G01C19/5747

Abstract: A microelectromechanical gyroscope includes: a substrate; a stator sensing structure fixed to the substrate; a first mass elastically constrained to the substrate and movable with respect to the substrate in a first direction; a second mass elastically constrained to the first mass and movable with respect to the first mass in a second direction; and a third mass elastically constrained to the second mass and to the substrate and capacitively coupled to the stator sensing structure, the third mass being movable with respect to the substrate in the second direction and with respect to the second mass in the first direction.

公开(公告)号：US20210002126A1

公开(公告)日：2021-01-07

申请号：US16917202

申请日：2020-06-30

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Enrico Rosario ALESSI ,  Fabio PASSANITI ,  Daniele PRATI

IPC: B81B7/00 ,  G01P21/00

Abstract: A system for diagnosing the operating state of a MEMS sensor includes a stimulation circuit, external to the MEMS sensor, configured to generate a stimulation signal designed to be detected by the MEMS sensor. The system has control circuitry, operatively coupled to the stimulation circuit and to the MEMS sensor, so as to control the stimulation circuit to generate the stimulation signal and receive a diagnostic signal generated by the MEMS sensor in response to the stimulation signal. The control circuitry determines an operating state of the MEMS sensor based on the diagnostic signal and an expected response to the stimulation signal by the MEMS sensor.

公开(公告)号：US20170108337A1

公开(公告)日：2017-04-20

申请号：US14964347

申请日：2015-12-09

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Daniele PRATI ,  Carlo VALZASINA ,  Luca Giuseppe FALORNI ,  Matteo Fabio BRUNETTO

IPC: G01C19/5733

CPC classification number: G01C19/5733 ,  G01C19/5747 ,  G01C19/5762

Abstract: A microelectromechanical gyroscope includes: a substrate; a stator sensing structure fixed to the substrate; a first mass elastically constrained to the substrate and movable with respect to the substrate in a first direction; a second mass elastically constrained to the first mass and movable with respect to the first mass in a second direction; and a third mass elastically constrained to the second mass and to the substrate and capacitively coupled to the stator sensing structure, the third mass being movable with respect to the substrate in the second direction and with respect to the second mass in the first direction.